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1. (WO2012170386) SYSTEMS AND METHODS FOR DEFECT DETECTION USING A WHOLE RAW IMAGE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2012/170386 International Application No.: PCT/US2012/040845
Publication Date: 13.12.2012 International Filing Date: 05.06.2012
IPC:
G01N 21/956 (2006.01) ,G01B 11/30 (2006.01) ,G06T 7/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
30
for measuring roughness or irregularity of surfaces
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
Applicants:
PHOTON DYNAMICS, INC. [US/US]; 5970 Optical Court San Jose, California 95138, US (AllExceptUS)
MOKICHEV, Nickolay [CA/US]; US (UsOnly)
Inventors:
MOKICHEV, Nickolay; US
Agent:
POGODIN, Pavel I.; Haynes and Boone, LLP IP Section 2323 Victory Avenue, Suite 700 Dallas, Texas 75219, US
Priority Data:
13/155,18607.06.2011US
Title (EN) SYSTEMS AND METHODS FOR DEFECT DETECTION USING A WHOLE RAW IMAGE
(FR) SYSTÈMES ET PROCÉDÉS POUR DÉTECTION DE DÉFAUT À L'AIDE D'UNE IMAGE BRUTE COMPLÈTE
Abstract:
(EN) An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.
(FR) L'invention concerne un appareil destiné à identifier un défaut dans un circuit électronique ayant des caractéristiques périodiques, l'appareil comprenant au moins un appareil photographique destiné à obtenir une image du circuit électronique et un système de traitement d'image. Le système de traitement d'image reçoit l'image du circuit électronique en provenance de l'appareil photographique, effectue un décalage en diagonal de l'image reçue du circuit électronique, d'au moins une dimension en diagonal des caractéristiques périodiques du circuit électronique, pour produire une image décalée du circuit électronique, identifie un défaut candidat à l'aide de l'image du circuit électronique et de l'image décalée du circuit électronique, calcule une ou plusieurs images (d'or) de référence sans défaut locales du circuit électronique à l'aide d'au moins une zone sélectionnée à proximité la plus étroite du défaut candidat identifié et détermine le défaut dans le circuit électronique à l'aide d'une ou plusieurs images d'or locales calculées du circuit électronique et l'image du circuit électronique.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN103765200JP2014523524KR1020140058440