Processing

Please wait...

Settings

Settings

Goto Application

1. WO2012151288 - MULTI-SPOT COLLECTION OPTICS

Publication Number WO/2012/151288
Publication Date 08.11.2012
International Application No. PCT/US2012/036137
International Filing Date 02.05.2012
IPC
G01N 21/63 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63optically excited
G01N 23/22 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
22by measuring secondary emission from the material
CPC
G01J 1/0425
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
0425using optical fibers
G01N 21/253
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
251Colorimeters; Construction thereof
253for batch operation, i.e. multisample apparatus
G01N 21/62
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
G01N 21/6452
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63optically excited
64Fluorescence; Phosphorescence
645Specially adapted constructive features of fluorimeters
6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
G01N 2201/0833
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2201Features of devices classified in G01N21/00
08Optical fibres; light guides
0833Fibre array at detector, resolving
G01T 1/2002
GPHYSICS
01MEASURING; TESTING
TMEASUREMENT OF NUCLEAR OR X-RADIATION
1Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
16Measuring radiation intensity
20with scintillation detectors
2002Optical details, e.g. reflecting or diffusing layers
Applicants
  • APPLIED MATERIALS ISRAEL, LTD. [IL]/[IL] (AllExceptUS)
  • APPLIED MATERIALS, INC. [US]/[US] (ZW)
  • CARL ZEISS SMT GMBH [DE]/[DE] (AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BE, BF, BG, BH, BJ, BR, BW, BY, BZ, CA, CF, CG, CH, CI, CL, CM, CN, CO, CR, CU, CY, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, FR, GA, GB, GD, GE, GH, GM, GN, GQ, GR, GT, GW, HN, HR, HU, ID, IE, IL, IN, IS, IT, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MC, MD, ME, MG, MK, ML, MN, MR, MT, MW, MX, MY, MZ, NA, NE, NG, NI, NL, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SI, SK, SL, SM, SN, ST, SV, SY, SZ, TD, TG, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, ZA, ZM)
  • EDER, Haim [IL]/[IL] (UsOnly)
  • ELMALIACH, Nissim [IL]/[IL] (UsOnly)
  • KRAYVITS (KRIVTS), Igor [IL]/[IL] (UsOnly)
  • MÜTZEL, Mario (UsOnly)
Inventors
  • EDER, Haim
  • ELMALIACH, Nissim
  • KRAYVITS (KRIVTS), Igor
  • MÜTZEL, Mario
Agents
  • FAHMI, Tarek, N.
Priority Data
61/481,88603.05.2011US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MULTI-SPOT COLLECTION OPTICS
(FR) OPTIQUE DE COLLECTE À FAISCEAUX MULTIPLES
Abstract
(EN) Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.
(FR) L'invention concerne un appareil destiné à détecter un rayonnement optique émis par un réseau de faisceaux sur un objet. L'appareil comprend plusieurs guides de lumière possédant des extrémités d'entrée et des extrémités de sortie respectives, les extrémités d'entrée étant arrangées de façon géométrique correspondant au réseau de faisceaux. Une optique relais collecte et focalise le rayonnement optique de l'objet sur les extrémités d'entrée de sorte que chaque extrémité d'entrée reçoive le rayonnement optique d'un des faisceaux correspondants. L'invention concerne également des détecteurs multiples dont chacun est couplé de manière à recevoir un rayonnement optique de l'extrémité de sortie d'un des guides de lumière respectifs.
Related patent documents
Latest bibliographic data on file with the International Bureau