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1. WO2012131183 - DIFFERENTIAL TEMPERATURE SENSOR AND ITS CMOS/BICMOS TECHNOLOGY CAPABILITIES

Publication Number WO/2012/131183
Publication Date 04.10.2012
International Application No. PCT/FR2012/000094
International Filing Date 15.03.2012
IPC
G01K 7/02 2006.01
GPHYSICS
01MEASURING; TESTING
KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
7Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat
02using thermo-electric elements, e.g. thermo-couples
CPC
G01K 7/028
GPHYSICS
01MEASURING; TESTING
KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
7Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat
02using thermoelectric elements, e.g. thermocouples
028using microstructures, e.g. made of silicon
H01L 35/34
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
35Thermoelectric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermoelectric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
34Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
Applicants
  • COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR]/[FR] (AllExceptUS)
  • ST-ERICSSON SA [CH]/[CH] (AllExceptUS)
  • SAVELLI, Guillaume [FR]/[FR] (UsOnly)
  • COTTIN, Denis [FR]/[FR] (UsOnly)
Inventors
  • SAVELLI, Guillaume
  • COTTIN, Denis
Agents
  • TALBOT, Alexandre
Priority Data
110089425.03.2011FR
Publication Language French (FR)
Filing Language French (FR)
Designated States
Title
(EN) DIFFERENTIAL TEMPERATURE SENSOR AND ITS CMOS/BICMOS TECHNOLOGY CAPABILITIES
(FR) CAPTEUR DIFFERENTIEL DE TEMPERATURE ET SES CAPACITES EN TECHNOLOGIE CMOS/BICMOS
Abstract
(EN)
The sensor is made on a semiconducting substrate (20) covered with an electrically insulating layer (21). The electrically insulating layer (21) separates a thermocouple (15) from the substrate (20). It comprises a first portion (21') exhibiting a first value of capacitance per unit area and a second portion (21") exhibiting a second value of capacitance per unit area which is smaller than the first value. The sensor comprises first (S1) and second (S2) output terminals linked to the thermocouple (15). The first output terminal (S1) comprises a first capacitor (I-1) having a first electrode formed by a first bar (13) made of an electrically conducting material. The second electrode of the capacitor (I-1) is formed by a part of the substrate (20) facing the said first bar (13) and separated from the first electrode by the first portion (21') of the electrically insulating layer. The first bar (13) links the thermocouple (15) while overlapping the second portion (21") of the electrically insulating layer.
(FR)
Le capteur est réalisé sur un substrat semi-conducteur (20) recouvert par une couche électriquement isolante (21). La couche électriquement isolante (21) sépare un thermocouple (15) du substrat (20). Elle comporte une première portion (21') présentant une première valeur de capacité par unité de surface et une deuxième portion (21") présentant une deuxième valeur de capacité par unité de surface inférieure à la première valeur. Le capteur comporte des premières (S1) et seconde (S2) bornes de sortie reliées au thermocouple (15). La première borne de sortie (S1) comporte un premier condensateur (I-1) ayant une première électrode formée par un premier barreau (13) en matériau électriquement conducteur. La deuxième électrode du condensateur (I-1) est formée par une partie du substrat (20) faisant face audit premier barreau (13) et séparée de la première électrode par la première portion (21') de la couche électriquement isolante. Le premier barreau (13) relie le thermocouple (15) en chevauchant la deuxième portion (21") de la couche électriquement isolante.
Also published as
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