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Machine translation
1. (WO2012127123) HOLDER FOR SILICON WAFERS, AND METHOD FOR TREATING SAID WAFERS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/127123    International Application No.:    PCT/FR2011/000153
Publication Date: 27.09.2012 International Filing Date: 18.03.2011
Chapter 2 Demand Filed:    13.12.2012    
IPC:
H01L 21/673 (2006.01), H01L 21/677 (2006.01)
Applicants: SEMCO ENGINEERING SA [FR/FR]; Parc Euromédecine 625, rue de la Croix Verte F-34196 Montpellier Cedex 5 (FR) (For All Designated States Except US).
PELLEGRIN, Yvon [FR/FR]; (FR) (For US Only)
Inventors: PELLEGRIN, Yvon; (FR)
Agent: RAVINA, Bernard; RAVINA SA ZA de Font Grasse BP 10077 8, rue des Briquetiers F-31703 Blagnac Cedex (FR)
Priority Data:
Title (EN) HOLDER FOR SILICON WAFERS, AND METHOD FOR TREATING SAID WAFERS
(FR) SUPPORT DE PLAQUETTES DE SILICIUM ET PROCÉDÉ DE TRAITEMENT DE CES PLAQUETTES
Abstract: front page image
(EN)The invention relates to a holder (1) for silicon wafers which is particularly characterized in that it includes an elongate pod (2) forming a cradle, which is provided so as to rest on the loading/unloading scoop of a treatment furnace, and at least one basket (3) provided so as to be removably mounted in the pod (2), said basket (3) having two opposite front (3a) and rear (3b) openings between which a series of horizontal recesses (30) are formed, said recesses being vertically spaced apart from one another, and each recess being open at the front and rear thereof as well as at the top and bottom thereof, and capable of accommodating at least one wafer (4) to be treated and of holding said wafer in a horizontal position, said recesses (30) extending horizontally between said front (3a) and rear (3b) openings.
(FR)Le support (1) pour plaquettes de silicium est remarquable notamment en ce qu'il comprend une nacelle longiforme (2) formant berceau, prévue pour reposer sur la pelle de chargement-déchargement d'un four de traitement, et au moins un panier (3) prévu pour être monté de manière amovible dans la nacelle (2), ledit panier (3) présentant deux ouvertures opposées avant (3a) et arrière (3b) entre lesquelles est formée une série de logements horizontaux (30) espacés verticalement les uns des autres, ouverts chacun vers l'avant et l'arrière ainsi que vers le haut et le bas, aptes chacun à recevoir au moins une plaquette (4) à traiter et à maintenir ladite plaquette dans une position horizontale, lesdits logements (30) s'étendant horizontalement entre les dites ouvertures avant (3a) et arrière (3b).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)