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Machine translation
1. (WO2012124583) DEVICE FOR MANUFACTURING SUBSTRATE FOR DISPLAY PANEL
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/124583    International Application No.:    PCT/JP2012/055904
Publication Date: 20.09.2012 International Filing Date: 08.03.2012
IPC:
B08B 3/12 (2006.01), B08B 3/02 (2006.01), G02F 1/13 (2006.01), G02F 1/1333 (2006.01), H01L 21/027 (2006.01), H01L 21/304 (2006.01)
Applicants: SHARP KABUSHIKI KAISHA [JP/JP]; 22-22, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka 5458522 (JP) (For All Designated States Except US).
YOSHIYASU Kentaro; (For US Only).
IKEDA Masataka; (For US Only)
Inventors: YOSHIYASU Kentaro; .
IKEDA Masataka;
Agent: AKATSUKI UNION PATENT FIRM; 5th Floor, Nittochi Nagoya Bldg., 1-1, Sakae 2-chome, Naka-ku, Nagoya-shi, Aichi 4600008 (JP)
Priority Data:
2011-056719 15.03.2011 JP
Title (EN) DEVICE FOR MANUFACTURING SUBSTRATE FOR DISPLAY PANEL
(FR) DISPOSITIF DE FABRICATION D'UN SUBSTRAT POUR UN PANNEAU D'AFFICHAGE
(JA) 表示パネル用基板の製造装置
Abstract: front page image
(EN)Each of a washing device (40), a developing device (44), an etching device (45) and a resist stripping device (46), which are devices for producing an array substrate (20) for a liquid crystal panel (11), comprises a roller conveyer (a conveying section) (50) which conveys a glass substrate (a substrate for a display panel) (GS) that serves as the array substrate (20), a nozzle (a treatment solution feeding section) (51) which feeds a treatment solution (L) onto the surface of the glass substrate (GS) that is conveyed by the roller conveyer (50), and an ultrasonic wave application section (56) which applies ultrasonic vibrations to the roller conveyer (50).
(FR)Selon l'invention, un dispositif de lavage (40), un dispositif de développement (44), un dispositif de gravure (45) et un dispositif de décapage de resist (46) qui sont des dispositifs pour produire un substrat de matrice (20) pour un panneau d'affichage à cristaux liquides (11), comprennent chacun un transporteur à rouleaux (une section de transport) (50) qui transporte un substrat de verre (un substrat pour un panneau d'affichage) (GS) qui sert de substrat de matrice (20), une buse (une section d'alimentation de solution de traitement) (51) qui injecte une solution de traitement (L) sur la surface du substrat de verre (GS) qui est transporté par le transporteur à rouleaux (50), et une section (56) d'application d'ondes ultrasoniques qui applique des vibrations ultrasoniques au transporteur à rouleaux (50).
(JA)液晶パネル(11)用のアレイ基板(20)の製造装置である洗浄装置(40)、現像装置(44)、エッチング装置(45)、レジスト剥離装置(46)は、アレイ基板(20)をなすガラス基板(表示パネル用基板)(GS)を搬送するローラコンベア(搬送部)(50)と、ローラコンベア(50)によって搬送されるガラス基板(GS)の板面上に処理液(L)を供給するノズル(処理液供給部)(51)と、ローラコンベア(50)に対して超音波振動を付与する超音波付与部(56)とを備える。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)