WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2012122342) POLYSILANESILOXANE RESINS FOR USE IN AN ANTIREFLECTIVE COATING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/122342    International Application No.:    PCT/US2012/028208
Publication Date: 13.09.2012 International Filing Date: 08.03.2012
IPC:
C09D 183/04 (2006.01), C08G 77/48 (2006.01)
Applicants: DOW CORNING CORPORATION [US/US]; 2200 West Salzburg Road Midland, MI 48686 (US) (For All Designated States Except US).
ZHOU, Xiaobing [US/US]; (US) (For US Only).
MOYER, Eric S. [US/US]; (US) (For US Only)
Inventors: ZHOU, Xiaobing; (US).
MOYER, Eric S.; (US)
Agent: WEISS, Keith D.; Brinks Hofer Gilson & Lione 524 South Main Street, Suite 200 Ann Arbor, MI 48104 (US)
Priority Data:
61/451,172 10.03.2011 US
Title (EN) POLYSILANESILOXANE RESINS FOR USE IN AN ANTIREFLECTIVE COATING
(FR) RÉSINES DE POLYSILANESILOXANE POUR UTILISATION DANS UN REVÊTEMENT ANTIREFLET
Abstract: front page image
(EN)Polysilanesiloxane copolymers or resins and method of making are provided. The present disclosure further provides a method of applying the polysilanesiloxane copolymers onto a substrate to form a polysilanesiloxane film for use in photolithography (193 nm). The polysilanesiloxane films meet the basic performance criteria expected or desired for use in an antireflection coating (ARC) application,
(FR)La présente invention concerne des copolymères ou résines de polysilanesiloxane et un procédé de fabrication. Elle concerne en outre un procédé d'application des copolymères de polysilanesiloxane sur un substrat pour former un film de polysilanesiloxane pour utilisation en photolithographie (193 nm). Les films de polysilanesiloxane satisfont aux critères de performance de base prévus ou souhaités pour utilisation dans une application de revêtement antireflet (ARC).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)