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1. (WO2012118952) APPARATUS AND PROCESS FOR ATOMIC LAYER DEPOSITION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/118952    International Application No.:    PCT/US2012/027247
Publication Date: 07.09.2012 International Filing Date: 01.03.2012
IPC:
H01L 21/205 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US) (For All Designated States Except US).
YUDOVSKY, Joseph [US/US]; (US) (For US Only)
Inventors: YUDOVSKY, Joseph; (US)
Agent: BLANKMAN, Jeffrey I.; Diehl Servilla LLC 33 Wood Avenue South Second Floor, Suite 210 Iselin, New Jersey 08830 (US)
Priority Data:
13/038,061 01.03.2011 US
13/189,708 25.07.2011 US
Title (EN) APPARATUS AND PROCESS FOR ATOMIC LAYER DEPOSITION
(FR) APPAREIL ET PROCÉDÉ DE DÉPÔT DE COUCHES ATOMIQUES
Abstract: front page image
(EN)Provided are atomic layer deposition apparatus and methods including multiple gas distribution plates including stages for moving substrates between the gas distribution plates.
(FR)L'invention concerne des procédés et un appareil de dépôt de couches atomiques comprenant plusieurs plaques de distribution de gaz comportant des plateaux pour le transport des substrats entre les plaques de distribution de gaz.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)