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Machine translation
1. (WO2012115682) EDGE RING FOR A THERMAL PROCESSING CHAMBER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/115682    International Application No.:    PCT/US2011/046008
Publication Date: 30.08.2012 International Filing Date: 29.07.2011
IPC:
H01L 21/683 (2006.01), H01L 21/324 (2006.01), H01L 21/02 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US) (For All Designated States Except US).
KOELMEL, Blake [US/US]; (US) (For US Only).
RANISH, Joseph M. [US/US]; (US) (For US Only).
MAYUR, Abhilash J. [US/US]; (US) (For US Only)
Inventors: KOELMEL, Blake; (US).
RANISH, Joseph M.; (US).
MAYUR, Abhilash J.; (US)
Agent: PATTERSON, B. Todd; Patterson & Sheridan, L.L.P. 3040 Post Oak Blvd., Suite 1500 Houston, Texas 77056-6582 (US)
Priority Data:
61/446,026 23.02.2011 US
Title (EN) EDGE RING FOR A THERMAL PROCESSING CHAMBER
(FR) JONC DE BORDURE POUR CHAMBRE DE TRAITEMENT THERMIQUE
Abstract: front page image
(EN)Embodiments of the present invention provide an edge ring for supporting a substrate with increased temperature uniformity. More particularly, embodiments of the present invention provide an edge ring having one or more surface area increasing structures formed on an energy receiving surface of the edge ring.
(FR)Des modes de réalisation de la présente invention concernent un jonc de bordure permettant de supporter un substrat avec une uniformité de température accrue. Plus particulièrement, des modes de réalisation de la présente invention concernent un jonc de bordure présentant une ou plusieurs structures d'augmentation de superficie formées sur une surface de réception d'énergie du jonc de bordure.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)