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1. (WO2012110708) NOVEL MICROMECHANICAL DEVICES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2012/110708 International Application No.: PCT/FI2012/050157
Publication Date: 23.08.2012 International Filing Date: 17.02.2012
IPC:
H03H 9/02 (2006.01) ,H03H 3/007 (2006.01) ,B81B 3/00 (2006.01)
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02
Details
[IPC code unknown for H03H 3/07]
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Applicants:
TEKNOLOGIAN TUTKIMUSKESKUS VTT [FI/FI]; Vuorimiehentie 3 FI-02044 VTT, FI (AllExceptUS)
PENSALA, Tuomas [FI/FI]; FI (UsOnly)
JAAKKOLA, Antti [FI/FI]; FI (UsOnly)
GANCHENKOVA, Maria [FI/FI]; FI (UsOnly)
PRUNNILA, Mika [FI/FI]; FI (UsOnly)
KIIHAMÄKI, Jyrki [FI/FI]; FI (UsOnly)
Inventors:
PENSALA, Tuomas; FI
JAAKKOLA, Antti; FI
GANCHENKOVA, Maria; FI
PRUNNILA, Mika; FI
KIIHAMÄKI, Jyrki; FI
Agent:
SEPPO LAINE OY; Itämerenkatu 3 B FI-00180 Helsinki, FI
Priority Data:
2011515117.02.2011FI
61/443,72517.02.2011US
Title (EN) NOVEL MICROMECHANICAL DEVICES
(FR) NOUVEAUX DISPOSITIFS MICROMÉCANIQUES
Abstract:
(EN) The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element (16) made of semiconductor material comprising n-type doping agent and excitation or sensing means (10, 14) functionally connected to said oscillating or deflecting element (16). According to the invention, the oscillating or deflecting element (16) is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
(FR) L'invention concerne un dispositif micromécanique et son procédé de fabrication. Le dispositif comprend un élément (16) oscillant ou fléchissant fait en matériau semi-conducteur comprenant un agent dopant de type n et des moyens (10, 14) d'excitation ou de détection qui sont fonctionnellement reliés audit élément (16) oscillant ou fléchissant. Selon l'invention, l'élément (16) oscillant ou fléchissant est dopé de manière essentiellement homogène à l'aide dudit agent dopant de type n. L'invention permet de concevoir une diversité de résonateurs pratiques ayant une faible dérive de température.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP2676366JP2014507096US20140077898CN103444079KR1020140021571