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1. (WO2012107674) DEVICE AND METHOD FOR ION BEAM SPUTTERING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/107674    International Application No.:    PCT/FR2012/050250
Publication Date: 16.08.2012 International Filing Date: 06.02.2012
IPC:
C23C 14/46 (2006.01), H01J 37/34 (2006.01)
Applicants: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE [FR/FR]; 3, Rue Michel Ange F-75794 Paris Cedex 16 (FR) (For All Designated States Except US).
SORTAIS, Pascal [FR/FR]; (FR) (For US Only).
LAMY, Thierry [FR/FR]; (FR) (For US Only)
Inventors: SORTAIS, Pascal; (FR).
LAMY, Thierry; (FR)
Agent: CABINET BEAUMONT; 1, Rue Champollion F-38000 Grenoble (FR)
Priority Data:
1150981 08.02.2011 FR
Title (EN) DEVICE AND METHOD FOR ION BEAM SPUTTERING
(FR) DISPOSITIF ET PROCEDE DE PULVERISATION IONIQUE
Abstract: front page image
(EN)The invention relates to a device for depositing a selected material on a substrate by means of ion beam sputtering, which includes a plurality of targets (11) of a selected material, each of which is bombarded by an ion beam, the lateral dimensions of each of the ion beams being less than one tenth of the lateral dimensions of the substrate (15).
(FR)L'invention concerne un dispositif de dépôt d'un matériau choisi sur un substrat par pulvérisation ionique, comprenant une pluralité de cibles (11) d'un matériau choisi dont chacune est bombardée par un faisceau d'ions, les dimensions latérales de chacun des faisceaux d'ions étant inférieures au dixième des dimensions latérales du substrat (15).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)