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Machine translation
1. (WO2012106612) IN-SITU HYDROXYLATION SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/106612    International Application No.:    PCT/US2012/023797
Publication Date: 09.08.2012 International Filing Date: 03.02.2012
IPC:
H01L 21/205 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US) (For All Designated States Except US).
CHOI, Kenric [US/US]; (US) (For US Only).
SATO, Tatsuya E. [JP/US]; (US) (For US Only).
ULLOA, Ernesto [US/US]; (US) (For US Only)
Inventors: CHOI, Kenric; (US).
SATO, Tatsuya E.; (US).
ULLOA, Ernesto; (US)
Agent: ALEGRIA, Rory P.; Diehl Servilla LLC 33 Wood Avenue South Second Floor, Suite 210 Iselin, New Jersey 08830 (US)
Priority Data:
61/439,686 04.02.2011 US
13/192,041 27.07.2011 US
61/543,614 05.10.2011 US
13/364,806 02.02.2012 US
Title (EN) IN-SITU HYDROXYLATION SYSTEM
(FR) SYSTÈME D'HYDROXYLATION IN-SITU
Abstract: front page image
(EN)Described are systems and methods for the Hydroxylation of a substrate surface using ammonia and water vapor.
(FR)L'invention concerne des systèmes et des procédés d'hydroxylation d'une surface de substrat au moyen d'ammoniac et de vapeur d'eau.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)