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1. (WO2012105786) BOAT FOR SUPPORTING SUBSTRATE AND SUPPORT UNIT USING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/105786    International Application No.:    PCT/KR2012/000715
Publication Date: 09.08.2012 International Filing Date: 31.01.2012
IPC:
H01L 21/683 (2006.01), H01L 21/324 (2006.01), G02F 1/13 (2006.01)
Applicants: TERASEMICON CORPORATION [KR/KR]; 267-24 Gyeonggidong-ro, Dongtan-myeon, Hwaseong-si Gyeonggi-do 445-812 (KR) (For All Designated States Except US).
KANG, Ho Young [KR/KR]; (KR) (For US Only).
PARK, Kyoung Wan [KR/KR]; (KR) (For US Only).
CHO, Byung Ho [KR/KR]; (KR) (For US Only).
PARK, Ju Young [KR/KR]; (KR) (For US Only)
Inventors: KANG, Ho Young; (KR).
PARK, Kyoung Wan; (KR).
CHO, Byung Ho; (KR).
PARK, Ju Young; (KR)
Agent: KIM, Han; 2F. 523 Nonhyeon-ro Gangnam-gu Seoul 135-909 (KR)
Priority Data:
10-2011-0010133 01.02.2011 KR
10-2011-0030216 01.04.2011 KR
Title (EN) BOAT FOR SUPPORTING SUBSTRATE AND SUPPORT UNIT USING SAME
(FR) NACELLE DE SUPPORT DE SUBSTRAT ET UNITÉ DE SUPPORT COMPRENANT CETTE NACELLE
(KO) 기판 지지용 보트 및 이를 사용한 지지유닛
Abstract: front page image
(EN)Disclosed are a boat for supporting a substrate and a support unit using same. The boat for supporting a substrate and the support unit according to the present invention enable the entire surface of the substrate to be uniformly supported, thereby preventing the sagging of the substrate due to the tare thereof when treating the substrate. Therefore, the reliability of the treatment process for the substrate is enhanced because the substrate does not experience a change in the characteristics even when treated.
(FR)L'invention concerne une nacelle destinée à supporter un substrat, et une unité de support comprenant cette nacelle. La nacelle de support de substrat et l'unité de support selon la présente invention permettent de supporter uniformément toute la surface du substrat, et d'empêcher ainsi l'affaissement du substrat pendant son traitement sous l'effet de son propre poids. La fiabilité du processus de traitement de substrat est par conséquent accrue, du fait que les caractéristiques du substrat ne sont pas modifiées, même lorsque le substrat est traité.
(KO)기판 지지용 보트 및 이를 사용한 지지유닛이 개시된다. 본 발명에 따른 기판 지지용 보트 및 지지유닛은 기판의 전체면이 균일하게 지지되므로, 기판의 처리시 기판이 자중에 의하여 처지는 것이 방지된다. 그러므로, 기판을 처리하여도, 기판의 특성 변화가 없으므로, 기판의 처리공정의 신뢰성이 향상되는 효과가 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)