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Machine translation
1. (WO2012101155) METHODS AND APPARATUSES FOR SINGLE SIDED WET PROCESSING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/101155    International Application No.:    PCT/EP2012/051107
Publication Date: 02.08.2012 International Filing Date: 25.01.2012
IPC:
B05D 1/18 (2006.01), B05D 7/22 (2006.01), B05C 3/02 (2006.01), B05C 3/04 (2006.01), B05C 3/09 (2006.01), B05C 3/109 (2006.01)
Applicants: LOTUS SYSTEMS GMBH [DE/DE]; Sautierstraße 23 78187 Geisingen (DE) (For All Designated States Except US).
HUBER, Klaus [DE/DE]; (DE) (For US Only).
HUTHWAITE, Steve [GB/GB]; (GB) (For US Only)
Inventors: HUBER, Klaus; (DE).
HUTHWAITE, Steve; (GB)
Agent: SCHIZ, Jochen; Kohler Schmid Möbus Kaiserstraße 85 72764 Reutlingen (DE)
Priority Data:
61/436,175 25.01.2011 US
61/486,393 16.05.2011 US
Title (EN) METHODS AND APPARATUSES FOR SINGLE SIDED WET PROCESSING
(FR) PROCÉDÉS ET APPAREILS DE TRAITEMENT SIMPLE FACE PAR VOIE HUMIDE
Abstract: front page image
(EN)In a Method of single sided wet-processing of one or more substrates, comprising exposing only one side of the substrates to a liquid medium for processing, the substrates are used for forming one or more walls of a process chamber of a processing system.
(FR)L'invention concerne un procédé de traitement simple face par voie humide caractérisé en ce qu'un ou plusieurs substrats, comportant une étape consistant à n'exposer qu'une face des substrats à un milieu liquide en vue du traitement, les substrats étant utilisés pour former une ou plusieurs parois d'une chambre de process d'un système de traitement.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)