WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2012099579) CHAMBER ELEMENTS AND A METHOD FOR PLACING A CHAMBER AT A LOAD POSITION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/099579    International Application No.:    PCT/US2011/021588
Publication Date: 26.07.2012 International Filing Date: 18.01.2011
IPC:
H01L 21/00 (2006.01)
Applicants: APPLIED MATERIALS ISRAEL LTD. [IL/IL]; 9 Oppenheimer Street 76236 Rehovot (IL) (For All Designated States Except US).
KRAYVITZ (KRIVTS), Igor [IL/IL]; (IL) (For US Only).
AVNERI, Israel [IL/IL]; (IL) (For US Only).
UZIEL, Yoram [IL/IL]; (IL) (For US Only).
SCHLIMOFF, Natan [IL/IL]; (IL) (For US Only).
SCHWARTZ, Gilad [IL/IL]; (IL) (For US Only).
MADMON, Yochanan [IL/IL]; (IL) (For US Only).
APPLIED MATERIALS, INC. [US/US]; PO Box 450a Santa Clara, CA 95052 (US) (ZW only)
Inventors: KRAYVITZ (KRIVTS), Igor; (IL).
AVNERI, Israel; (IL).
UZIEL, Yoram; (IL).
SCHLIMOFF, Natan; (IL).
SCHWARTZ, Gilad; (IL).
MADMON, Yochanan; (IL)
Agent: FAHMI, Tarek, N.; SNR Denton US LLP P.O. Box 061080 Wacker Drive Station, Willis Tower Chicago, IL 60606 (US)
Priority Data:
Title (EN) CHAMBER ELEMENTS AND A METHOD FOR PLACING A CHAMBER AT A LOAD POSITION
(FR) ÉLÉMENTS DE CHAMBRE ET PROCÉDÉ DE PLACEMENT DE CHAMBRE EN POSITION DE CHARGEMENT
Abstract: front page image
(EN)Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.
(FR)L'invention concerne des éléments de chambre qui définissent une chambre et qui comprennent un premier élément offrant une première surface, un second élément, un premier joint dynamique et un mécanisme de chargement. Le second élément comprend un élément flottant extérieur qui comprend une seconde surface autour de la périphérie de la chambre et un élément flottant intérieur. La seconde surface et la première surface sont maintenues proches l'une de l'autre lorsque la chambre est dans une position de chargement et lorsque la chambre est fermée. Le mécanisme de chargement peut déplacer l'élément flottant intérieur pour l'éloigner de l'élément flottant extérieur jusqu'à ce qu'un écart entre l'élément flottant intérieur et le second élément s'ouvre pour faciliter le chargement du dispositif dans la chambre. Un système de mouvement peut générer un mouvement relatif entre le premier élément et le second élément.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)