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Machine translation
1. (WO2012096678) GST FILM THICKNESS MONITORING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/096678    International Application No.:    PCT/US2011/022138
Publication Date: 19.07.2012 International Filing Date: 21.01.2011
IPC:
H01L 21/66 (2006.01), H01L 21/8247 (2006.01), H01L 27/115 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US) (For All Designated States Except US).
XU, Kun [US/US]; (US) (For US Only).
LIU, Feng [CN/US]; (US) (For US Only).
BENVEGNU, Dominic J. [US/US]; (US) (For US Only).
SWEDEK, Boguslaw A. [PL/US]; (US) (For US Only).
WANG, Yuchun [US/US]; (US) (For US Only).
TU, Wen-Chiang [CN/US]; (US) (For US Only).
KARUPPIAH, Laksh [US/US]; (US) (For US Only)
Inventors: XU, Kun; (US).
LIU, Feng; (US).
BENVEGNU, Dominic J.; (US).
SWEDEK, Boguslaw A.; (US).
WANG, Yuchun; (US).
TU, Wen-Chiang; (US).
KARUPPIAH, Laksh; (US)
Agent: GOREN, David J.; Fish & Richardson P.C. P.O. Box 1022 Minneapolis, Minnesota 55440-1022 (US)
Priority Data:
12/697,177 29.01.2010 US
Title (EN) GST FILM THICKNESS MONITORING
(FR) CONTRÔLE DE L'ÉPAISSEUR D'UN FILM GST
Abstract: front page image
(EN)In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam reflects from the first substrate to generate a reflected light beam having an infra-red component. A sequence of measurements of intensity of the infra-red component of the reflected light beam are generated, and, in a processor, a time at which the sequence of measurements exhibits a predefined feature is determined.
(FR)L'invention concerne le contrôle de l'épaisseur d'un film GST. Lors du polissage d'un substrat comportant une couche de GST déposée sur une couche sous-jacente, un faisceau de lumière non polarisée est dirigé sur la couche de GST. Un faisceau de lumière réfléchi possédant une composante infrarouge est obtenu par la réflexion du faisceau de lumière non polarisée sur le premier substrat. Une séquence de mesures de l'intensité de la composante infrarouge du faisceau de lumière réfléchi est générée et un processeur détermine le moment où la séquence de mesures présente une caractéristique prédéfinie.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)