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1. WO2012084968 - ELECTRON CYCLOTRON RESONANCE IONIZATION DEVICE

Publication Number WO/2012/084968
Publication Date 28.06.2012
International Application No. PCT/EP2011/073434
International Filing Date 20.12.2011
IPC
H01J 27/18 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27Ion beam tubes
02Ion sources; Ion guns
16using high-frequency excitation, e.g. microwave excitation
18with an applied axial magnetic field
H01J 41/12 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
41Discharge tubes and means integral therewith for measuring gas pressure; Discharge tubes for evacuation by diffusion of ions
12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
CPC
H01J 27/18
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27Ion beam tubes
02Ion sources; Ion guns
16using high-frequency excitation, e.g. microwave excitation
18with an applied axial magnetic field
H01J 41/12
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
41Discharge tubes for measuring pressure of introduced gas ; or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
H05H 13/005
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE
13Magnetic resonance accelerators; Cyclotrons
005Cyclotrons
H05H 2007/082
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE
7Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
08Arrangements for injecting particles into orbits
081Sources
082Ion sources, e.g. ECR, duoplasmatron, PIG, laser sources
Applicants
  • COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR]/[FR] (AllExceptUS)
  • PACQUET, Jean-Yves [FR]/[FR] (UsOnly)
  • MAUNOURY, Laurent [FR]/[FR] (UsOnly)
Inventors
  • PACQUET, Jean-Yves
  • MAUNOURY, Laurent
Agents
  • LEBKIRI, Alexandre
Priority Data
106098421.12.2010FR
Publication Language French (FR)
Filing Language French (FR)
Designated States
Title
(EN) ELECTRON CYCLOTRON RESONANCE IONIZATION DEVICE
(FR) DISPOSITIF D'IONISATION À LA RÉSONANCE CYCLOTRON ÉLECTRONIQUE
Abstract
(EN)
The present invention relates to an electron cyclotron resonance ionization device (100, 100', 200, 200') comprising: a sealed vacuum chamber (2) intended to contain a plasma (15, 15'); means for injecting (12, 16) an electromagnetic wave into said sealed chamber; and a magnetic structure (20) for generating a magnetic field in said chamber and for generating a plasma (15, 15') along the magnetic field lines, the modulus of said magnetic field forming a magnetic mirror structure with at least one electron cyclotron resonance region. The device (100, 100', 200, 200') is characterized in that the sealed chamber (2) is a waveguide, the length L of which is greater than or equal to the guide wavelength corresponding to the frequency of the injected electromagnetic wave, and in that the plasma is ignited without the pre-injection of gas.
(FR)
La présente invention concerne un dispositif d'ionisation (100, 100', 200, 200') à la résonance cyclotron électronique comportant une chambre étanche (2) sous vide destinée à contenir un plasma (15, 15'), des moyens d'injection (12, 16) d'une onde électromagnétique à l'intérieur de ladite chambre étanche; une structure magnétique (20) pour engendrer un champ magnétique dans ladite chambre et pour générer un plasma (15, 15') suivant les lignes de champ magnétique, le module dudit champ magnétique présentant une configuration, de type miroir magnétique, avec au moins une zone de résonance cyclotron électronique. Ledit dispositif (100, 100', 200, 200') étant caractérisé en ce que ladite chambre étanche (2) est un guide d'ondes dont la longueur L est supérieure ou égale à la longueur d'onde guide correspondant à la fréquence de l'onde électromagnétique injectée, et en ce que le plasma est amorcé sans injection préalable de gaz.
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