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1. WO2012082510 - PROBE CARD STIFFENER WITH DECOUPLING

Publication Number WO/2012/082510
Publication Date 21.06.2012
International Application No. PCT/US2011/063889
International Filing Date 08.12.2011
IPC
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
G01R 1/073 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
CPC
G01R 1/07378
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
07307with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
07364with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
07378using an intermediate adapter, e.g. space transformers
G01R 31/2891
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
2851Testing of integrated circuits [IC]
2886Features relating to contacting the IC under test, e.g. probe heads; chucks
2891related to sensing or controlling of force, position, temperature
Applicants
  • FORMFACTOR, INC. [US]/[US] (AllExceptUS)
  • CHANG, Kevin S. [US]/[US] (UsOnly)
  • HOBBS, Eric D. [US]/[US] (UsOnly)
Inventors
  • CHANG, Kevin S.
  • HOBBS, Eric D.
Agents
  • BURRASTON, N. Kenneth
Priority Data
12/967,30214.12.2010US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PROBE CARD STIFFENER WITH DECOUPLING
(FR) RAIDISSEUR DE CARTE SONDE À DÉCOUPLAGE
Abstract
(EN)
A stiffener for a probe card assembly can include decoupling mechanisms disposed within radial arms of the stiffener. The decoupling mechanisms can be compliant in a direction along a radial direction of said radial arm and rigid in a direction perpendicular to said radial arm. The decoupling mechanisms can decouple the stiffener from thermally induced differential radial contraction and expansion of the stiffener relative to the cardholder to which the stiffener is mounted. This can reduce thermally-induced vertical translation of the probe card assembly.
(FR)
L'invention porte sur un raidisseur pour un ensemble carte sonde, lequel raidisseur peut comprendre des mécanismes de découplage disposés à l'intérieur de bras radiaux du raidisseur. Les mécanismes de découplage peuvent être élastiques dans une direction le long d'une direction radiale dudit bras radial et rigides dans une direction perpendiculaire audit bras radial. Les mécanismes de découplage peuvent découpler le raidisseur vis-à-vis d'une contraction et d'une dilatation radiales différentielles thermiquement induites du raidisseur par rapport au support de carte sur lequel est monté le raidisseur. Ceci peut réduire une translation verticale induite thermiquement de l'ensemble carte sonde.
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Latest bibliographic data on file with the International Bureau