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1. WO2012081294 - TUNING BAR TYPE PIEZOELECTRIC VIBRATOR AND TUNING FORK TYPE PIEZOELECTRIC VIBRATOR

Publication Number WO/2012/081294
Publication Date 21.06.2012
International Application No. PCT/JP2011/072526
International Filing Date 30.09.2011
IPC
G01C 19/56 2012.01
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
H01L 41/08 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
H01L 41/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
09with electrical input and mechanical output
H01L 41/187 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
16Selection of materials
18for piezo-electric or electrostrictive elements
187Ceramic compositions
H03H 9/19 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
19consisting of quartz
CPC
G01C 19/5607
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5607using vibrating tuning forks
G01C 19/5642
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5642using vibrating bars or beams
H01L 41/047
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive devices
047Electrodes ; or electrical connection arrangements
H01L 41/107
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
107with electrical input and electrical output ; , e.g. transformers
H03H 9/21
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
21Crystal tuning forks
H03H 9/583
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
46Filters
54comprising resonators of piezo-electric or electrostrictive material
58Multiple crystal filters
582implemented with thin-film techniques
583comprising a plurality of piezoelectric layers acoustically coupled
Applicants
  • 株式会社村田製作所 MURATA MANUFACTURING CO., LTD. [JP]/[JP] (AllExceptUS)
  • 倉川 晴好 KURAKAWA, Haruyoshi [JP]/[JP] (UsOnly)
Inventors
  • 倉川 晴好 KURAKAWA, Haruyoshi
Agents
  • 特許業務法人 宮▲崎▼・目次特許事務所 MIYAZAKI & METSUGI
Priority Data
2010-28076516.12.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) TUNING BAR TYPE PIEZOELECTRIC VIBRATOR AND TUNING FORK TYPE PIEZOELECTRIC VIBRATOR
(FR) VIBREUR PIÉZO-ÉLECTRIQUE DE TYPE DIAPASON DROIT ET VIBREUR PIÉZO-ÉLECTRIQUE DE TYPE DIAPASON FOURCHU
(JA) 音片型圧電振動子及び音叉型圧電振動子
Abstract
(EN)
Provided are a tuning bar type piezoelectric vibrator and tuning fork type piezoelectric vibrator with which improved drive efficiency and detection sensitivity can be achieved, simplification of manufacturing steps can be achieved, and furthermore increased design freedom can be obtained. First and second internal drive electrodes (5, 6) serving as internal drive electrodes are laminated between first and second piezoelectric layers (3, 4) that are polarised in opposite directions in the thickness direction. A first external electrode (7) and second external electrode (8) are formed so as to face the first and second internal drive electrodes (5, 6) with the piezoelectric layers (3, 4) interposed therebetween. The tuning bar type piezoelectric vibrator (1) comprises first and second vibrating sections (1A, 1B) in which the internal drive electrodes (5, 6) are employed as drive electrodes. The tuning fork type piezoelectric vibrator has first and second leg sections comprising the tuning bar type piezoelectric vibrator (1).
(FR)
L'invention concerne un vibreur piézo-électrique de type diapason droit et un vibreur piézo-électrique de type diapason fourchu, qui permettent d'améliorer l'efficacité de l'excitation et la sensibilité de la détection, de simplifier les étapes de fabrication, et offrent en outre une plus grande liberté dans la conception. Une première électrode d'excitation interne et une deuxième électrode d'excitation interne (5, 6) sont disposées en un assemblage stratifié entre une première couche piézo-électrique et une deuxième couche piézo-électrique (3, 4) qui sont polarisées dans des sens opposés dans la direction de l'épaisseur. Une première électrode externe (7) et une deuxième électrode externe (8) sont formées de façon à faire face à la première électrode d'excitation interne et à la deuxième électrode d'excitation interne (5, 6), les couches piézo-électriques (3, 4) étant interposées entre lesdites électrodes. Le vibreur piézo-électrique de type diapason droit (1) comprend une première section vibrante et une deuxième section vibrante (1A, 1B) dans lesquelles les électrodes d'excitation internes (5, 6) jouent leur rôle d'électrodes d'excitation. Le vibreur piézo-électrique de type diapason fourchu comporte une première section formant une branche et une deuxième section formant une branche contenant le vibreur piézo-électrique de type diapason droit (1).
(JA)
 駆動効率や検出感度を高めることができ、製造工程の簡略化を果たすことができ、さらに設計の自由度を高め得る音片型圧電振動子及び音叉型圧電振動子を提供する。 厚み方向において逆方向に分極されている第1,第2の圧電体層3,4間に内部駆動電極として第1,第2の内部駆動電極5,6が積層されており、第1の内部駆動電極5,6と圧電体層3,4を介してそれぞれ対向するように、第1の外部電極7及び第2の外部電極8が形成されており、内部駆動電極5,6が駆動用電極として用いられている第1,第2の振動部1A,1Bが構成されている音片型圧電振動子1、並びに該音片型圧電振動子1からなる第1,第2の脚部を有する音叉型圧電振動子。
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