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1. WO2012070496 - SUBSTRATE TRANSPORT DEVICE

Publication Number WO/2012/070496
Publication Date 31.05.2012
International Application No. PCT/JP2011/076685
International Filing Date 18.11.2011
IPC
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
B65G 49/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
CPC
B65G 2249/045
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
04Arrangements of vacuum systems or suction cups
045Details of suction cups suction cups
B65G 49/061
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP] (AllExceptUS)
  • 宮浦 博彰 MIYAURA, Hiroaki (UsOnly)
  • 昼岡 正樹 HIRUOKA, Masaki (UsOnly)
  • 小谷 直樹 KOTANI, Naoki (UsOnly)
Inventors
  • 宮浦 博彰 MIYAURA, Hiroaki
  • 昼岡 正樹 HIRUOKA, Masaki
  • 小谷 直樹 KOTANI, Naoki
Agents
  • 特許業務法人深見特許事務所 Fukami Patent Office, p.c.
Priority Data
2010-26212825.11.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE TRANSPORT DEVICE
(FR) DISPOSITIF DE TRANSPORT DE SUBSTRAT
(JA) 基板搬送装置
Abstract
(EN)
This substrate transport device is provided with a lower side arm (51) that carries a substrate (26) to which a polyimide film has been applied into a drying furnace for drying the polyimide film by heating and a lower side arm pad (61) attached to the lower side arm (51). The lower side arm pad (61) has a base part (62), which is affixed to the lower side arm (51), and a mounting part (64) on which the substrate (26) is mounted. The base part (62) has a top face (63). The mounting part (64) protrudes from a portion of the top face (63) in a direction away from the lower side arm (51). Because of this constitution, a substrate transport device that achieves uniform drying of a liquid film applied on a substrate is provided.
(FR)
L'invention porte sur un dispositif de transport de substrat qui comporte un bras de côté inférieur (51) qui porte un substrat (26) auquel un film de polyimide a été appliqué dans un four de séchage pour sécher le film de polyimide par chauffage et un tampon de bras de côté inférieur (61) fixé au bras de côté inférieur (51). Le tampon de bras de côté inférieur (61) a une partie de base (62), qui est fixée au bras de côté inférieur (51), et une partie de montage (64) sur laquelle le substrat (26) est monté. La partie de base (62) a une face supérieure (63). La partie de montage (64) fait saillie à partir d'une partie de la surface supérieure (63) dans une direction à l'opposé du bras de côté inférieur (51). En raison de cette structure, est obtenu un dispositif de transport de substrat qui réalise un séchage uniforme d'un film liquide appliqué sur un substrat.
(JA)
 基板搬送装置は、ポリイミド膜が塗布された基板(26)を、加熱によりポリイミド膜を乾燥させるための乾燥炉に搬入する下側アーム(51)と、下側アーム(51)に取り付けられる下側アーム用パッド(61)とを備える。下側アーム用パッド(61)は、下側アーム(51)に固定されるベース部(62)と、基板(26)が載置される載置部(64)とを有する。ベース部(62)は、頂面(63)を有する。載置部(64)は、頂面(63)の一部から下側アーム(51)より遠ざかる方向に突出する。このような構成により、基板上に塗布された液膜の均一な乾燥を実現する基板搬送装置を提供する。
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