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1. WO2012070314 - MICROSCOPE SPECTROMETER, OPTICAL AXIS SHIFT CORRECTION DEVICE, SPECTROSCOPE AND MICROSCOPE USING SAME

Publication Number WO/2012/070314
Publication Date 31.05.2012
International Application No. PCT/JP2011/072771
International Filing Date 03.10.2011
IPC
G01N 21/65 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63optically excited
65Raman scattering
G01J 3/26 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
CPC
G01J 2003/1213
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1213Filters in general, e.g. dichroic, band
G01J 2003/1226
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1226Interference filters
G01J 2003/1243
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1226Interference filters
1243Pivoting IF or other position variation
G01J 3/0227
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
0227using notch filters
G01J 3/06
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
06Scanning arrangements ; arrangements for order-selection
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Applicants
  • 横河電機株式会社 Yokogawa Electric Corporation [JP]/[JP] (AllExceptUS)
  • 伊賀 光博 IGA Mitsuhiro [JP]/[JP] (UsOnly)
Inventors
  • 伊賀 光博 IGA Mitsuhiro
Agents
  • 志賀 正武 SHIGA Masatake
Priority Data
2010-25992122.11.2010JP
2010-27910015.12.2010JP
2010-28057616.12.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) MICROSCOPE SPECTROMETER, OPTICAL AXIS SHIFT CORRECTION DEVICE, SPECTROSCOPE AND MICROSCOPE USING SAME
(FR) SPECTROMÈTRE DE MICROSCOPE, DISPOSITIF DE CORRECTION DE DÉCALAGE D'AXE D'OPTIQUE, SPECTROSCOPE ET MICROSCOPE L'UTILISANT
(JA) 顕微鏡用分光分析装置、光軸ズレ補正装置、分光装置とそれを用いた顕微鏡
Abstract
(EN)
A microscope spectrometer for analyzing scattered light emitted by a sample, said light being incident to the microscope, when excitation light is directed from a light source onto the sample, is provided with: a first optical means for focusing the scattered light into a parallel beam; a first variable bandpass filter means having a variable transmitting wavelength range in which incident light is permitted to be penetrate, and through which, of the incident scattered light that has been focused into a parallel beam, light in the predetermined transmitting wavelength range is transmitted; a two-dimensional array light detection means for forming the scattered light in the transmitting wavelength range into images; and a control means for controlling the timing of the images of the two-dimensional array light detection means, and for changing the transmitting wavelength range of the first variable bandpass filter means in accordance with the timing.
(FR)
La présente invention concerne un spectromètre de microscope destiné à analyser la lumière diffusée émise par un échantillon, ladite lumière étant incidente sur le microscope lorsque la lumière d'excitation est dirigée à partir d'une source de lumière sur l'échantillon. Ledit spectromètre comprenant : un premier moyen optique servant à focaliser la lumière diffusée en un faisceau parallèle ; un premier moyen de filtre passe-bande variable ayant une plage de longueur d'onde de transmission variable dans lequel la lumière incidente peut pénétrer, et à travers lequel, de la lumière diffusée incidente qui a été focalisée en un faisceau parallèle, la lumière dans la plage de longueur d'onde de transmission prédéterminée est transmise ; un moyen de détection de lumière de réseau bidimensionnel servant à former en images la lumière diffusée dans la plage de longueur d'onde de transmission ; et un moyen de commande servant à commander la synchronisation des images du moyen de détection de lumière de réseau bidimensionnel, et à modifier la plage de longueur d'onde de transmission du premier moyen de filtre passe-bande variable selon la synchronisation.
(JA)
 光源から試料に励起光が照射されると、顕微鏡に入射される前記試料が発する散乱光を分析する顕微鏡用分光分析装置において、前記散乱光を平行光束にする第1の光学手段と、入射した光を透過させる透過波長帯域が可変であって、入射した平行光束の前記散乱光のうち予め定められた前記透過波長帯域の光を透過する第1の可変バンドパスフィルタ手段と、前記透過波長帯域の前記散乱光を撮像する2次元アレイ光検出手段と、前記2次元アレイ光検出手段の撮像のタイミングを制御し、このタイミングに合わせて前記第1の可変バンドパスフィルタ手段の前記透過波長帯域を変更する制御手段と、を、備える顕微鏡用分光分析装置。
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