Processing

Please wait...

PATENTSCOPE will be unavailable a few hours for maintenance reason on Saturday 31.10.2020 at 7:00 AM CET
Settings

Settings

Goto Application

1. WO2012067926 - PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY

Publication Number WO/2012/067926
Publication Date 24.05.2012
International Application No. PCT/US2011/060100
International Filing Date 10.11.2011
IPC
H01L 29/84 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66Types of semiconductor device
84controllable by variation of applied mechanical force, e.g. of pressure
G01R 27/26 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
27Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants
CPC
B82Y 10/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
10Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
B82Y 15/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
15Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
B82Y 30/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
30Nanotechnology for materials or surface science, e.g. nanocomposites
B82Y 40/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
40Manufacture or treatment of nanostructures
G01N 27/127
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating the impedance of the material
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid ; , for detecting components in the fluid
125Composition of the body, e.g. the composition of its sensitive layer
127comprising nanoparticles
G01N 27/4146
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
4146involving nanosized elements, e.g. nanotubes, nanowires
Applicants
  • THE GOVERNMENT OF THE UNITED STATE OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY [US]/[US] (AllExceptUS)
  • PEHRSSON, Pehr, E. [US]/[US] (UsOnly)
  • FIELD, Chistopher [US]/[US] (UsOnly)
  • IN, Hyun Jin [US]/[US] (UsOnly)
Inventors
  • PEHRSSON, Pehr, E.
  • FIELD, Chistopher
  • IN, Hyun Jin
Agents
  • RESSING, Amy, L.
Priority Data
61/413,66415.11.2010US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY
(FR) ÉLECTRODE DE CONTACT PERFORÉE SUR UN RÉSEAU DE NANOFILS VERTICAL
Abstract
(EN)
Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.
(FR)
La présente invention a trait à une structure qui est dotée : d'un support, d'une pluralité de nanofils qui sont perpendiculaires au support et d'une électrode qui est en contact avec une première extrémité de chaque nanofil. Chaque nanofil est doté d'une seconde extrémité qui est en contact avec le support. L'électrode contient une pluralité de perforations. La présente invention a également trait à un procédé comprenant les étapes consistant : à fournir le support et les nanofils mentionnés ci-dessus ; à déposer une couche de matière de remplissage qui recouvre une partie de chaque nanofil et qui laisse une première extrémité de chaque nanofil exposée ; à déposer une pluralité de nanoparticules sur la matière de remplissage ; à déposer une matière d'électrode sur les nanoparticules, les extrémités des nanofils et toute matière de remplissage exposée ; et à retirer les nanoparticules et la matière de remplissage de manière à former une électrode qui est en contact avec la première extrémité de chaque nanofil ; laquelle électrode contient une pluralité de perforations.
Other related publications
Latest bibliographic data on file with the International Bureau