Processing

Please wait...

Settings

Settings

Goto Application

1. WO2012064949 - DUAL ARM ROBOT

Publication Number WO/2012/064949
Publication Date 18.05.2012
International Application No. PCT/US2011/060174
International Filing Date 10.11.2011
IPC
B25J 9/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
02characterised by movement of the arms, e.g. cartesian co-ordinate type
04by rotating at least one arm, excluding the head movement itself, e.g. cylindrical co-ordinate type or polar co-ordinate type
CPC
B25J 11/0095
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
11Manipulators not otherwise provided for
0095Manipulators transporting wafers
B25J 9/042
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
02characterised by movement of the arms, e.g. cartesian coordinate type
04by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
041Cylindrical coordinate type
042comprising an articulated arm
B25J 9/043
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
02characterised by movement of the arms, e.g. cartesian coordinate type
04by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
041Cylindrical coordinate type
042comprising an articulated arm
043double SCARAR arms
H01L 21/67742
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67742Mechanical parts of transfer devices
H01L 21/68771
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68714the wafers being placed on a susceptor, stage or support
68771characterised by supporting more than one semiconductor substrate
Applicants
  • BROOKS AUTOMATION, INC. [US]/[US] (AllExceptUS)
  • CAVENEY, Robert, T. [US]/[US] (UsOnly)
  • KRUPYSHEV, Alexander [US]/[US] (UsOnly)
  • MARTIN, Elliott, R. [US]/[US] (UsOnly)
  • HOFMEISTER, Christopher [US]/[US] (UsOnly)
Inventors
  • CAVENEY, Robert, T.
  • KRUPYSHEV, Alexander
  • MARTIN, Elliott, R.
  • HOFMEISTER, Christopher
Agents
  • MARCOVICI, Janik
Priority Data
13/293,71710.11.2011US
61/412,21810.11.2010US
61/451,91211.03.2011US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) DUAL ARM ROBOT
(FR) ROBOT À DEUX BRAS
Abstract
(EN)
A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
(FR)
La présente invention concerne un appareil de traitement de substrat qui comprend un châssis, un premier bras accouplé au châssis au niveau d'un axe d'épaule comportant une première partie bras, une première partie avant-bras et au moins un support de substrat qui sont accouplés en série et rotatifs les uns par rapports aux autres, un second bras accouplé au châssis au niveau de l'axe d'épaule, à l'emplacement où les axes de rotation d'épaule des bras coïncident sensiblement, le second bras comportant une seconde partie bras, une second partie avant-bras et au moins un support de substrat qui sont accouplés en série et rotatifs les par rapport aux autres, et une section d'entraînement reliée au châssis et accouplée aux bras, la section d'entraînement étant conçue pour déployer et faire tourner indépendamment chaque bras, un axe de déploiement du premier bras formant un angle avec un axe de déploiement du second bras sensiblement à chaque position angulaire du premier bras et/ou du second bras.
Latest bibliographic data on file with the International Bureau