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1. WO2012060083 - ILLUMINATION DEVICE, EXPOSURE DEVICE, PROGRAM, AND ILLUMINATION METHOD

Publication Number WO/2012/060083
Publication Date 10.05.2012
International Application No. PCT/JP2011/006080
International Filing Date 31.10.2011
IPC
H01L 21/027 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
027Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
G02B 5/00 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
G02B 5/08 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
08Mirrors
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G02B 26/06
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
06for controlling the phase of light
G02B 26/0833
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
0816by means of one or more reflecting elements
0833the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
G02B 27/0905
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0905Dividing and/or superposing multiple light beams
G03F 7/70116
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70058Mask illumination systems
70091Illumination settings, i.e. intensity distribution in the pupil plane, angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole, quadrupole; Partial coherence control, i.e. sigma or numerical aperture [NA]
70116Off-axis setting using a programmable means, e.g. LCD or DMD
Applicants
  • 株式会社ニコン NIKON CORPORATION [JP]/[JP] (AllExceptUS)
  • 北 尚憲 KITA, Naonori [JP]/[JP] (UsOnly)
  • 藤村 嘉彦 FUJIMURA, Yoshihiko [JP]/[JP] (UsOnly)
  • 澤田 正康 SAWADA, Masayasu [JP]/[JP] (UsOnly)
  • 松尾 則之 MATSUO, Noriyuki [JP]/[JP] (UsOnly)
Inventors
  • 北 尚憲 KITA, Naonori
  • 藤村 嘉彦 FUJIMURA, Yoshihiko
  • 澤田 正康 SAWADA, Masayasu
  • 松尾 則之 MATSUO, Noriyuki
Agents
  • 龍華国際特許業務法人 RYUKA IP Law Firm
Priority Data
2010-24915505.11.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) ILLUMINATION DEVICE, EXPOSURE DEVICE, PROGRAM, AND ILLUMINATION METHOD
(FR) DISPOSITIF D'ÉCLAIRAGE, DISPOSITIF D'EXPOSITION, PROGRAMME ET PROCÉDÉ D'ÉCLAIRAGE
(JA) 照明装置、露光装置、プログラムおよび照明方法
Abstract
(EN)
The present invention accurately generates a desired illumination pattern. An illumination device for illuminating a surface to be irradiated by light from a light source comprises: a spatial light modulation element for projecting a plurality of reflected light beams onto a projection surface and forming an illumination pattern, the spatial light modulation element having a plurality of reflecting mirrors for reflecting incident light from a light source at individually set angles of reflection to emit the reflected light beams; a calculation unit for calculating the respective angles of reflection of the reflecting mirrors under the condition of further reducing mutual interference among the reflected light beams for forming the illumination pattern; and a drive unit for driving the reflecting mirrors and setting, for each of the reflecting mirrors, the angles of reflection calculated by the calculation unit.
(FR)
La présente invention permet de générer de manière précise un motif d'éclairage voulu. Un dispositif d'éclaire conçu pour éclairer une surface à irradier par une lumière issue d'une source lumineuse comprend : un élément de modulation spatiale de la lumière pour projeter une pluralité de faisceaux lumineux réfléchis sur une surface de projection et former un motif d'éclairage, ledit élément de modulation spatiale de la lumière comprenant une pluralité de miroirs réfléchissants pour réfléchir la lumière incidente provenant d'une source lumineuse à des angles de réflexion individuellement définis pour émettre les faisceaux lumineux réfléchis ; une unité de calcul pour calculer les angles de réflexion respectifs des miroirs réfléchissants dans le but de réduire davantage l'interférence mutuelle entre les faisceaux lumineux réfléchis pour former le motif d'éclairage ; et une unité de commande pour commander les miroirs réfléchissants et déterminer, pour chacun des miroirs réfléchissants, les angles de réflexion calculés par l'unité de calcul.
(JA)
 求められた照明パターンを正確に生成する。光源からの光で被照射面を照明する照明装置であって、入射した光源光を個別に設定された反射角度で反射して複数の反射光を射出する複数の反射鏡を有し、複数の反射光を投射面に投射して照明パターンを形成する空間光変調素子と、照明パターンを形成する複数の反射光相互の干渉をより小さくする条件の下に、複数の反射鏡それぞれの反射角度を算出する算出部と、複数の反射鏡を駆動して、算出部が算出した反射角度を複数の反射鏡のそれぞれに設定する駆動部とを備える。
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