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1. WO2012059479 - DEVICE-SPECIFIC MARKINGS

Publication Number WO/2012/059479
Publication Date 10.05.2012
International Application No. PCT/EP2011/069173
International Filing Date 31.10.2011
IPC
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
H01L 23/544 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23Details of semiconductor or other solid state devices
544Marks applied to semiconductor devices, e.g. registration marks, test patterns
CPC
G03F 7/70216
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70216Systems for imaging mask onto workpiece
H01L 21/6835
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
6835using temporarily an auxiliary support
H01L 2221/6835
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2221Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
683for supporting or gripping
68304using temporarily an auxiliary support
6835used as a support during build up manufacturing of active devices
H01L 2223/54406
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2223Details relating to semiconductor or other solid state devices covered by the group H01L23/00
544Marks applied to semiconductor devices or parts
54406comprising alphanumeric information
H01L 2223/54413
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2223Details relating to semiconductor or other solid state devices covered by the group H01L23/00
544Marks applied to semiconductor devices or parts
54413comprising digital information, e.g. bar codes, data matrix
H01L 2223/54433
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2223Details relating to semiconductor or other solid state devices covered by the group H01L23/00
544Marks applied to semiconductor devices or parts
54433containing identification or tracking information
Applicants
  • PLASTIC LOGIC LIMITED [GB]/[GB] (AllExceptUS)
  • DOEBELT, Andreas (UsOnly)
Inventors
  • DOEBELT, Andreas
Agents
  • EVANS, Marc, Nigel
Priority Data
1018403.401.11.2010GB
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) DEVICE-SPECIFIC MARKINGS
(FR) MARQUAGES SPÉCIFIQUES À UN DISPOSITIF
Abstract
(EN)
Producing a plurality of electronic devices by a technique including photolithographically patterning a layer of conductive material (3), and defining at least one device-specific mark (3a) of a respective one of the plurality of devices as part of photolithographically patterning said layer of conductive material.
(FR)
L'invention vise à produire une pluralité de dispositifs électroniques par une technique comprenant la réalisation de motif par photolithographie sur une couche de matériau conducteur (3), et la définition d'au moins une marque spécifique à un dispositif (3a) d'un dispositif respectif de la pluralité de dispositifs comme partie de la réalisation de motif par photolithographie de ladite couche de matériau conducteur.
Also published as
DE112011103633
GB1309408.1
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