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1. WO2012058005 - APPARATUS HAVING IMPROVED SUBSTRATE TEMPERATURE UNIFORMITY USING DIRECT HEATING METHODS

International Application Status
DateTitleViewDownload
30.11.2020International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
DateTitleViewDownload
21.06.2012Later publication of international search report( (A3 25/2012))PDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
03.05.2012Initial Publication without ISR( (A2 18/2012))PDF (28p.)PDF (28p.), ZIP(XML + TIFFs)
Search and Examination-Related Documents
DateTitleViewDownload
30.04.2013(IB/373) International Preliminary Report on Patentability Chapter IPDF (5p.)PDF (5p.), ZIP(XML + TIFFs)
28.04.2013(ISA/237) Written Opinion of the International Searching AuthorityPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
08.05.2012(ISA/210) International Search ReportPDF (3p.)PDF (3p.), ZIP(XML + TIFFs)
Related Documents on file at the International Bureau
DateTitleViewDownload
30.04.2013(IB/326) Notification of Transmittal of Copies of International Preliminary Report on Patentability Chapter IPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
19.02.2013(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.06.2012(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
22.05.2012(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.05.2012(ISA/202) Notification of Receipt of Search CopyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.05.2012(RO/102) Notification Concerning Payment of Prescribed FeesPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
03.05.2012Priority DocumentPDF (39p.)PDF (39p.), ZIP(XML + TIFFs)
03.05.2012(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.05.2012(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.05.2012Application Body as FiledPDF (28p.)PDF (28p.), ZIP(XML + TIFFs)
03.05.2012(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.05.2012(RO/101) Request formPDF (4p.)
03.05.2012(RO/105) Notification of the International Application Number and of the International Filing DatePDF (1p.)PDF (1p.), ZIP(XML + TIFFs)