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1. WO2012058005 - APPARATUS HAVING IMPROVED SUBSTRATE TEMPERATURE UNIFORMITY USING DIRECT HEATING METHODS

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[ EN ]

We Claim:

1. An apparatus for thermally processing a substrate, comprising:

a carrier support having an inner region for supporting a substrate carrier and an outer region that extends a desired distance beyond an outer edge of the substrate carrier;

an annular carrier ring having an inner region that is supported by an edge region of the substrate carrier during processing and an outer region that extends a desired distance beyond an outer edge of the substrate carrier; and

one or more lamps positioned to deliver electromagnetic energy to the annular carrier ring and to the substrate carrier.

2. The apparatus of claim 1 , wherein the substrate carrier, carrier support and annular carrier ring both comprise silicon carbide.

3. The apparatus of claim 1 , wherein the distance from the outer edge of the substrate carrier to an outer edge of the annular carrier ring is equal to or greater than 25% of a diameter of a substrate disposed on a substrate receiving surface of the substrate carrier during processing.

4. The apparatus of claim 1 , wherein the distance from an edge of a substrate disposed on a substrate receiving surface of the substrate carrier to the carrier outer edge is equal to or greater than 25% of the substrate diameter, wherein the edge of the substrate is the farthest point on the edge of the substrate from the central axis.

5. An apparatus for thermally processing a substrate, comprising:

a carrier support having a first surface that has a first emissivity, a second surface that has a second emissivity, an inner region for supporting a substrate carrier and an outer region that extends a desired distance beyond an outer edge of the substrate carrier; and

one or more lamps positioned to deliver electromagnetic energy to the carrier support and to the substrate carrier, wherein the first surface of the carrier support is in the line-of-sight of the one or more lamps, the second surface of the carrier support is not in line-of-sight of the one or more lamps, and the first emissivity is greater than the second emissivity.

6. The apparatus of claim 5, wherein the substrate carrier and carrier support both comprise silicon carbide.

7. The apparatus of claim 5, wherein the carrier support further comprises a carrier outer edge, and wherein the distance from the outer edge of the substrate carrier to the carrier outer edge is equal to or greater than 25% of a diameter of a substrate disposed on the substrate carrier.

8. The apparatus of claim 5, further comprising an annular carrier ring having an inner region that is disposed over a region of the substrate carrier during processing and an outer region that extends a desired distance beyond the outer edge of the substrate carrier.

9. An apparatus for thermally processing a substrate, comprising:

a carrier support having a central axis and a supporting feature;

a substrate carrier disposed on the supporting feature, and having a carrier outer edge;

a carrier ring disposed over the substrate carrier, and having a ring inner edge, a ring outer edge and a body portion disposed between the ring inner edge and the ring outer edge, wherein the carrier outer edge is a greater distance from the central axis than the ring inner edge, and the ring outer edge is a greater distance from the central axis than the carrier outer edge; and

one or more lamps positioned to deliver electromagnetic energy to the carrier support, the body portion of the carrier ring and the substrate carrier.

10. The apparatus of claim 9, wherein the substrate carrier and carrier ring are both comprise silicon carbide.

1 1 . The apparatus of claim 9, wherein the distance from an edge of a substrate disposed on the substrate carrier to the ring outer edge is equal to or greater than 25% of the substrate diameter, wherein the edge of the substrate is the farthest point on the edge of the substrate from the central axis.

12. The apparatus of claim 9, wherein the distance from an edge of a substrate disposed on the substrate carrier to the carrier outer edge is equal to or greater than 25% of the substrate diameter, wherein the edge of the substrate is the farthest point on the edge of the substrate from the central axis.

13. The apparatus of claim 9, further comprising an actuator that is configured to rotate the carrier support about the central axis.

14. A method of growing an epitaxial material on a substrate, comprising:

positioning a substrate carrier having a plurality of substrates disposed thereon on a carrier support disposed in a processing volume of a processing chamber;

disposing an annular carrier ring on the substrate carrier; wherein a region of a body portion of the annular carrier ring extends over a region adjacent to an outer edge of the substrate carrier;

rotating the substrate carrier, annular carrier ring and the carrier support about a central axis; and

delivering energy to the substrate carrier and the carrier support, wherein an outer edge of the carrier support is a greater distance from the central axis than an outer edge the substrate carrier, and delivering energy comprises heating one or more substrates disposed on the substrate carrier to a temperature greater than about 800 °C.

15. The method of claim 14, wherein the distance from an edge of a substrate disposed on the substrate carrier to an outer edge of the substrate carrier is equal to or greater than 25% of the substrate diameter, wherein the edge of the substrate is the farthest point on the edge of the substrate from the central axis.