Processing

Please wait...

Settings

Settings

Goto Application

1. WO2012057283 - SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM

Publication Number WO/2012/057283
Publication Date 03.05.2012
International Application No. PCT/JP2011/074854
International Filing Date 27.10.2011
IPC
G01B 21/20 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
20for measuring contours or curvatures, e.g. determining profile
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 21/04
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
02for measuring length, width, or thickness
04by measuring coordinates of points
G01B 21/045
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
02for measuring length, width, or thickness
04by measuring coordinates of points
045Correction of measurements
G01B 21/20
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
20for measuring contours or curvatures, e.g. determining profile
G01B 5/008
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
004for measuring coordinates of points
008using coordinate measuring machines
Y10T 29/49718
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49718Repairing
Applicants
  • 株式会社ニコン NIKON CORPORATION [JP]/[JP] (AllExceptUS)
  • 神藤 建太 KANTO, Kenta [JP]/[JP] (UsOnly)
Inventors
  • 神藤 建太 KANTO, Kenta
Agents
  • 川北 喜十郎 KAWAKITA, Kijuro
Priority Data
2010-24134027.10.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM
(FR) DISPOSITIF DE MESURE DE FORME, PROCÉDÉ DE MESURE DE FORME, PROCÉDÉ DE FABRICATION DE STRUCTURE ET PROGRAMME
(JA) 形状測定装置、形状測定方法、構造物の製造方法およびプログラム
Abstract
(EN)
[Problem] To simplify setting processing (teaching processing) of a region to be measured with respect to a subject to be inspected. [Solution] Disclosed is a shape measuring device which is provided with: a detecting unit (20) which detects the surface shape of a subject to be inspected, said subject having a three-dimensional shape; and a region setting unit (58) which sets, on the basis of measurement data of the shape detected in a predetermined specified region, a region adjacent to the specified region as a region to be measured.
(FR)
L'invention a pour but de simplifier le traitement de définition (procédé d'apprentissage) d'une région à mesurer par rapport à un sujet à inspecter. L'invention concerne un dispositif de mesure de forme qui comprend : une unité de détection (20) détectant la forme de la surface d'un objet à inspecter, ledit objet ayant une forme tridimensionnelle; et une unité de définition de région (58) qui définit, sur la base de données de mesure de la forme détectée dans une région prédéterminée spécifiée, une région adjacente à la région déterminée en tant que région à mesurer.
(JA)
【課題】被検物に対する測定領域の設定処理(ティーチング処理)を簡素化する。 【解決手段】形状測定装置は、三次元形状を有している被検物の表面形状を検出する検出部20と、予め定められた指定領域において検出された形状測定データに基づいて、前記指定領域に隣接する領域を測定領域として設定する領域設定部58と、を備える。
Other related publications
Latest bibliographic data on file with the International Bureau