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1. WO2012057215 - CORDIERITE CERAMIC, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE DEVICES WHICH COMPRISES SAME

Publication Number WO/2012/057215
Publication Date 03.05.2012
International Application No. PCT/JP2011/074691
International Filing Date 26.10.2011
IPC
C04B 35/195 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
16based on silicates other than clay
18rich in aluminium oxide
195Alkaline earth aluminosilicates, e.g. cordierite
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
CPC
C04B 2235/3206
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
3206Magnesium oxides or oxide-forming salts thereof
C04B 2235/3217
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
C04B 2235/3222
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
3222Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
C04B 2235/3224
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
C04B 2235/3225
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
3225Yttrium oxide or oxide-forming salts thereof
C04B 2235/3229
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
3229Cerium oxides or oxide-forming salts thereof
Applicants
  • 京セラ株式会社 KYOCERA CORPORATION [JP]/[JP] (AllExceptUS)
  • 飯田 修一 IIDA, Shuichi [JP]/[JP] (UsOnly)
  • 福飯 明雄 FUKUI, Akeo [JP]/[JP] (UsOnly)
  • 須恵 敏幸 SUE, Toshiyuki [JP]/[JP] (UsOnly)
Inventors
  • 飯田 修一 IIDA, Shuichi
  • 福飯 明雄 FUKUI, Akeo
  • 須恵 敏幸 SUE, Toshiyuki
Priority Data
2010-23979826.10.2010JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CORDIERITE CERAMIC, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE DEVICES WHICH COMPRISES SAME
(FR) CÉRAMIQUE DE CORDIÉRITE, ET COMPOSANT POUR DISPOSITIFS DE FABRICATION DE SEMI-CONDUCTEUR QUI COMPREND CELLE-CI
(JA) コージェライト質セラミックスおよびこれを用いた半導体製造装置用部材
Abstract
(EN)
[Problem] To provide: a cordierite ceramic having a small thermal expansion coefficient and excellent mechanical strength; and a member for semiconductor manufacture devices, which is manufactured using the cordierite ceramic. [Solution] Provided is a cordierite ceramic which contains a main component having a chemical composition comprising Mg in an amount of 12.6-14.0 mass% inclusive in terms of oxide content, Al in an amount of 33.4-34.4 mass% inclusive in terms of oxide content and Si in an amount of 52.0-53.6 mass% inclusive in terms of oxide content, and also contains one element selected from Y, Yb, Er and Ce as an auxiliary component in an amount of 4.5-15.0 mass% inclusive in terms of oxide content relative to 100 mass% of the main component, wherein cordierite, disilicate and spinel are present as crystal phases. The cordierite ceramic has a thermal expansion coefficient ranging from -120 ppb/˚C to +120 ppb/˚C, four-point bending strength of 170 MPa or greater, low thermal expansion performance and excellent mechanical strength.
(FR)
[Problème] Produire : une céramique de cordiérite ayant un coefficient de dilatation thermique faible et une résistance mécanique excellente ; et un composant pour dispositifs de fabrication de semi-conducteur, qui est fabriqué en utilisant la céramique de cordiérite. [Solution] La présente invention concerne une céramique de cordiérite qui contient un composant principal ayant une composition chimique comprenant Mg en une quantité de 12,6 à 14,0 % en masse inclus en termes de teneur en oxyde, Al en une quantité de 33,4 à 34,4 % en masse inclus en termes de teneur en oxyde et Si en une quantité de 52,0 à 53,6 % en masse inclus en termes de teneur en oxyde, et contient en outre un élément choisi parmi Y, Yb, Er et Ce en tant que composant auxiliaire en une quantité de 4,5 à 15,0 % en masse inclus en termes de teneur en oxyde par rapport à 100 % en masse du composant principal, de la cordiérite, du disilicate et de la spinelle étant présents sous forme de phases cristallines. La céramique de cordiérite a un coefficient de dilatation thermique dans la plage de ‑120 ppb/°C à +120 ppb/°C, une résistance à la flexion à quatre points de 170 MPa ou plus, des performances de dilatation thermique faibles et une excellente résistance mécanique.
(JA)
 【課題】 熱膨張係数が小さく、機械的強度に優れたコージェライト質セラミックスおよびこれを用いた半導体製造装置用部材を提供する。 【解決手段】 Mgを酸化物換算で12.6質量%以上14.0質量%以下,Alを酸化物換算で33.4質量%以上34.4質量%以下およびSiを酸化物換算で52.0質量%以上53.6質量%以下の組成範囲からなる主成分100質量%に対し、副成分としてY,Yb,ErおよびCeのいずれか1種を酸化物換算で4.5質量%以上15.0質量%以下含んでなり、結晶相としてコージェライト、ダイシリケートおよびスピネルが存在しているコージェライト質セラミックスである。このコージェライト質セラミックスは、熱膨張係数が±120ppb/℃の範囲内であり、4点曲げ強度が170MPa以上であり、低熱膨張性および優れた機械的強度を有するものである。
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