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1. WO2012056376 - ANALYSIS OF MOLECULAR CONTAMINATION IN VACUUM ENVIRONMENTS

Publication Number WO/2012/056376
Publication Date 03.05.2012
International Application No. PCT/IB2011/054678
International Filing Date 20.10.2011
IPC
B01D 53/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
02by adsorption, e.g. preparative gas chromatography
G01N 1/40 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
28Preparing specimens for investigation
40Concentrating samples
CPC
B01D 53/025
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
02by adsorption, e.g. preparative gas chromatography
025with wetted adsorbents; Chromatography
B01D 53/0407
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
02by adsorption, e.g. preparative gas chromatography
04with stationary adsorbents
0407Constructional details of adsorbing systems
G01N 1/405
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
28Preparing specimens for investigation ; including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
40Concentrating samples
405by adsorption or absorption
G01N 2030/025
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography
02Column chromatography
022characterised by the kind of separation mechanism
025Gas chromatography
G01N 2033/0019
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
0004Gaseous mixtures, e.g. polluted air
0009General constructional details of gas analysers, e.g. portable test equipment
0011Sample conditioning
0019by preconcentration
G01N 30/06
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography
02Column chromatography
04Preparation or injection of sample to be analysed
06Preparation
Applicants
  • KONINKLIJKE PHILIPS ELECTRONICS N.V. [NL]/[NL] (AllExceptUS)
  • SOERS, Ruud Johannes Theodorus [NL]/[NL] (UsOnly)
  • KNOBEL, Hugo Hubertus [NL]/[NL] (UsOnly)
  • DE BOKX, Pieter Klaas [NL]/[NL] (UsOnly)
Inventors
  • SOERS, Ruud Johannes Theodorus
  • KNOBEL, Hugo Hubertus
  • DE BOKX, Pieter Klaas
Agents
  • KROEZE, John
Priority Data
10188653.925.10.2010EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ANALYSIS OF MOLECULAR CONTAMINATION IN VACUUM ENVIRONMENTS
(FR) ANALYSE DE LA CONTAMINATION MOLÉCULAIRE DANS DES ENVIRONNEMENTS SOUS VIDE
Abstract
(EN)
A pre-concentration device is provided for a gas analysis system (10) for collecting molecular contamination in a vacuum environment (11). The pre-concentration device (13) comprises a hollow element (15) having an entrance opening (20) for receiving molecules from the vacuum environment (11) in a collection phase, a gas outlet for transferring collected molecules to a vacuum compatible detector or second preconcentration device in a transfer phase. The device has an inner wall for adsorbing molecules in the collection phase and desorbing molecules in the transfer phase. The device has a filler element (14) that is movable from a first position outside the hollow element in the collection phase to a second position inside the hollow element in the transfer phase which second position leaves open a transfer channel to the gas outlet along the inner wall. Advantageously, the device enables transferring of the organic or inorganic contaminants collected in the device under vacuum conditions, and requires a minimal amount of ultra pure gas for the transport of the contaminants to a detector or further a concentration device, which lowers the lower limit of detection.
(FR)
L'invention concerne un dispositif de pré-concentration pour un système d'analyse de gaz (10) destiné à collecter la contamination moléculaire dans un environnement sous vide (11). Le dispositif de pré-concentration (13) comprend un élément creux (15) présentant une ouverture d'entrée (20) pour recevoir des molécules de l'environnement sous vide (11) dans une phase de collecte, une sortie de gaz destinée au transfert des molécules collectées dans un détecteur compatible avec le vide ou dans un deuxième dispositif de pré-concentration dans une phase de transfert. Le dispositif présente une paroi interne pour l'absorption des molécules dans la phase de collecte et pour la désorption des molécules dans la phase de transfert. Le dispositif présente un élément de charge (14) qui est mobile à partir d'un première position à l'extérieur de l'élément creux dans la phase de collecte vers une deuxième position à l'intérieur de l'élément creux dans la phase de transfert, laquelle deuxième position laissant ouvert un canal de transfert vers la sortie de gaz le long de la paroi interne. De manière avantageuse, le dispositif permet le transfert des contaminants organiques ou inorganiques collectés dans le dispositif dans des conditions de vide et nécessite une quantité minimale de gaz ultra-pur pour le transport des contaminants vers un détecteur ou plus loin vers un dispositif de concentration, qui abaisse la limite de détection.
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