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Machine translation
1. (WO2012054690) APPARATUS FOR FORMING A MAGNETIC FIELD AND METHODS OF USE THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/054690    International Application No.:    PCT/US2011/057025
Publication Date: 26.04.2012 International Filing Date: 20.10.2011
IPC:
H05H 1/40 (2006.01), H01F 7/06 (2006.01), H01F 27/28 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US) (For All Designated States Except US).
LERAY, Gary [FR/US]; (US) (For US Only).
RAUF, Shahid [US/US]; (US) (For US Only).
TODOROW, Valentin N. [US/US]; (US) (For US Only)
Inventors: LERAY, Gary; (US).
RAUF, Shahid; (US).
TODOROW, Valentin N.; (US)
Agent: TABOADA, Alan; Moser Taboada 1030 Broad Street Suite 203 Shrewsbury, New Jersey 07702 (US)
Priority Data:
61/405,970 22.10.2010 US
13/097,800 29.04.2011 US
Title (EN) APPARATUS FOR FORMING A MAGNETIC FIELD AND METHODS OF USE THEREOF
(FR) APPAREIL PERMETTANT DE FORMER UN CHAMP MAGNÉTIQUE ET PROCÉDÉS D'UTILISATION DE CE DERNIER
Abstract: front page image
(EN)Apparatus for forming a magnetic field and methods of use thereof are provided herein. In some embodiments, a plurality of coils having substantially similar dimensions disposed about a process chamber in a symmetric pattern centered about a central axis of the process chamber, wherein the plurality of coils are configured to produce a magnetic field having a plurality of magnetic field lines that are substantially planar and substantially parallel. In some embodiments, the plurality of coils comprises eight coils disposed about the process chamber, wherein each of the eight coils is offset by an angle of about 45 degrees from respective adjacent coils of the eight coils.
(FR)La présente invention se rapporte à un appareil permettant de former un champ magnétique et à des procédés d'utilisation de ce dernier. Selon certains modes de réalisation, une pluralité de bobines présentant des dimensions sensiblement similaires sont disposées autour d'une chambre de traitement selon un motif symétrique centré autour d'un axe central de la chambre de traitement, la pluralité de bobines étant configurées pour produire un champ magnétique qui présente une pluralité de lignes de champ magnétique qui sont sensiblement planes et sensiblement parallèles. Selon certains modes de réalisation, la pluralité de bobines comprend huit bobines disposées autour de la chambre de traitement, chacune des huit bobines étant décalée d'un angle d'environ 45 degrés par rapport aux bobines adjacentes respectives des huit bobines.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)