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1. (WO2012052864) PLASMA IGNITION AND SUSTAINING METHODS AND APPARATUSES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/052864    International Application No.:    PCT/IB2011/054326
Publication Date: 26.04.2012 International Filing Date: 03.10.2011
IPC:
B23K 9/00 (2006.01)
Applicants: LAM RESEARCH CORPORATION [US/US]; 4650 Cushing Parkway Fremont, California CA-94538 (US) (For All Designated States Except US).
LAM RESEARCH AG [AT/AT]; SEZ-Strasse 1 A-9500 Villach (AT) (BZ only).
BENJAMIN, Neil, Martin, Paul [GB/US]; (US) (For US Only).
FISCHER, Andreas [US/US]; (US) (For US Only)
Inventors: BENJAMIN, Neil, Martin, Paul; (US).
FISCHER, Andreas; (US)
Agent: KONTRUS, Gerhard; SEZ-Strasse 1 A-9500 Villach (AT)
Priority Data:
12/908,459 20.10.2010 US
Title (EN) PLASMA IGNITION AND SUSTAINING METHODS AND APPARATUSES
(FR) PROCÉDÉS ET APPAREILS D'ALLUMAGE ET D'ENTRETIEN DE PLASMA
Abstract: front page image
(EN)An apparatus for generating plasma including a plasma generating vessel and a coil having a coil length and a first set of partially enclosing, longitudinally oriented conductive (PELOC) fingers and a second set of PELOC fingers. The PELOC finger sets are oriented along a longitudinal axis of the vessel with each partially enclosing a periphery of the vessel. The two sets of PELOC fingers are oriented fingertips facing fingertips and separated by an inter-set distance that is less than the coil length.
(FR)L'invention porte sur un appareil pour la génération de plasma, lequel appareil comprend un récipient de génération de plasma et une bobine ayant une longueur de bobine et un premier ensemble de doigts conducteurs orientés longitudinalement, partiellement enveloppants (PELOC) et un second ensemble de doigts PELOC. Les ensembles de doigts PELOC sont orientés le long d'un axe longitudinal du récipient, chacun enfermant partiellement une périphérie du récipient. Les deux ensembles de doigts PELOC sont des bouts de doigts orientés tournés vers des bouts de doigts et séparés par une distance inter-ensemble qui est inférieure à la longueur de bobine.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)