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Machine translation
1. (WO2012052334) LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/052334    International Application No.:    PCT/EP2011/067819
Publication Date: 26.04.2012 International Filing Date: 12.10.2011
IPC:
H01L 21/67 (2006.01)
Applicants: APPLIED MATERIALS, INC. [--/US]; 3050 Bowers Ave. Santa Clara, California 95054 (US) (For All Designated States Except US).
GEBELE, Thomas [DE/DE]; (DE) (For US Only).
LEIPNITZ, Thomas [DE/DE]; (DE) (For US Only).
BUSCHBECK, Wolfgang [DE/DE]; (DE) (For US Only).
BANGERT, Stefan [DE/DE]; (DE) (For US Only).
LINDENBERG, Ralph [DE/DE]; (DE) (For US Only)
Inventors: GEBELE, Thomas; (DE).
LEIPNITZ, Thomas; (DE).
BUSCHBECK, Wolfgang; (DE).
BANGERT, Stefan; (DE).
LINDENBERG, Ralph; (DE)
Agent: ZIMMERMANN, Gerd; Zimmermann & Partner Josephspitalstr. 15 80331 München (DE)
Priority Data:
10188415.3 21.10.2010 EP
Title (EN) LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING
(FR) SAS DE CHARGEMENT, SYSTÈME DE TRAITEMENT DE SUBSTRATS ET PROCÉDÉ DE MISE À L'ATMOSPHÈRE
Abstract: front page image
(EN)A lock chamber for a substrate processing system is provided which includes at least a first conduit adapted to provide an inner portion of the lock chamber in fluid communication with atmospheric pressure or overpressure. Additionally, the lock chamber includes at least a first control valve for controlling a flow rate of the fluid communication of the inner portion of the chamber with the atmospheric pressure or the overpressure, wherein the control valve is adapted to continuously control the flow rate. Furthermore, an according method, a computer program and a computer readable medium adapted for performing the method is provided.
(FR)L'invention concerne un sas de chargement pour un système de traitement de substrats, comprenant au moins une première conduite conçue pour mettre une partie intérieure du sas de chargement en communication fluidique avec la pression atmosphérique ou une surpression. En outre, le sas de chargement comprend au moins une première vanne de commande destinée à commander le débit de la communication fluidique de la partie intérieure du sas de téléchargement avec la pression atmosphérique ou la surpression. La vanne de commande est conçue pour commander le débit en continu. L'invention concerne en outre un procédé correspondant, un programme d'ordinateur et un support lisible par ordinateur pour mettre en œuvre le procédé.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)