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Machine translation
1. (WO2012050111) COATING DEVICE AND COATING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/050111    International Application No.:    PCT/JP2011/073392
Publication Date: 19.04.2012 International Filing Date: 12.10.2011
IPC:
B05C 5/02 (2006.01), B05D 1/26 (2006.01), H01L 31/04 (2006.01)
Applicants: TOKYO OHKA KOGYO CO., LTD. [JP/JP]; 150, Nakamaruko, Nakahara-ku, Kawasaki-shi, Kanagawa 2110012 (JP) (For All Designated States Except US).
MIYAMOTO Hidenori [JP/JP]; (JP) (For US Only).
HIRAKAWA Tadahiko [JP/JP]; (JP) (For US Only).
MISUMI Koichi [JP/JP]; (JP) (For US Only)
Inventors: MIYAMOTO Hidenori; (JP).
HIRAKAWA Tadahiko; (JP).
MISUMI Koichi; (JP)
Agent: TANAI Sumio; 1-9-2, Marunouchi, Chiyoda-ku, Tokyo 1006620 (JP)
Priority Data:
2010-230573 13.10.2010 JP
Title (EN) COATING DEVICE AND COATING METHOD
(FR) DISPOSITIF DE REVÊTEMENT ET PROCÉDÉ DE REVÊTEMENT
(JA) 塗布装置及び塗布方法
Abstract: front page image
(EN)A coating device provided with: a coating element (CT) having a nozzle (NZ) which discharges from one end (NZa) a liquid (Q) containing an easily oxidized metal and hydrazine; and a relative driving element (NA) which relatively displaces the positions of a base (S) and the nozzle (NZ). An affinity adjustment element (AF) is formed so that the affinity between the liquid (Q) and the nozzle (NZ) is weaker than the affinity between portions of the liquid (Q), at least at the one end (NZa) of the nozzle (NZ). The construction of the coating device is such that when the liquid is applied onto the base, no spots are left unevenly coated.
(FR)L'invention porte sur un dispositif de revêtement comportant : un élément de revêtement (CT) ayant une buse (NZ) qui distribue, à partir d'une extrémité (NZa), un liquide (Q) contenant un métal facilement oxydé et de l'hydrazine ; et un élément d'entraînement relatif (NA) qui déplace relativement les positions d'une base (S) et de la buse (NZ). Un élément d'ajustement d'affinité (AF) est formé de telle sorte que l'affinité entre le liquide (Q) et la buse (NZ) est plus faible que l'affinité entre les parties du liquide (Q), au moins à ladite extrémité (NZa) de la buse (NZ). La construction du dispositif de revêtement est telle que, lorsque le liquide est appliqué sur la base, aucune tâche n'est laissée déposée de manière inégale.
(JA) 易酸化性の金属とヒドラジンとを含む液状体(Q)を先端部分(NZa)から吐出するノズル(NZ)を有する塗布部(CT)と、基板(S)と前記ノズル(NZ)とを相対移動させる相対駆動部(NA)とを備える塗布装置において、ノズル(NZ)のうち少なくとも先端部分(NZa)には、液状体(Q)との間の親和性が液状体(Q)同士の親和性よりも弱くなるように形成された親和性調整部(AF)を設けたものである。 当該構成により、基板上に液状体をムラなく塗布できる。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)