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1. (WO2012048156) METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/048156    International Application No.:    PCT/US2011/055163
Publication Date: 12.04.2012 International Filing Date: 06.10.2011
IPC:
G01B 11/24 (2006.01), G01N 21/47 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; Akasaka Biz Tower, 3-1 Akasaka 5-chome Minatoku, 107-6325 (JP) (For All Designated States Except US).
KLA-TENCOR CORPORATION [US/US]; One Technology Drive Milpitas, CA 95035 (US) (For All Designated States Except US).
SHIH, Meng-Fu [US/US]; (US) (For US Only).
KIM, In-Kyo [KR/US]; (US) (For US Only).
ZHANG, Xiafang [US/US]; (US) (For US Only).
POSLAVSKY, Leonid [US/US]; (US) (For US Only)
Inventors: SHIH, Meng-Fu; (US).
KIM, In-Kyo; (US).
ZHANG, Xiafang; (US).
POSLAVSKY, Leonid; (US)
Agent: VINCENT, Lester, J.; Blakely, Sokoloff, Taylor & Zafman LLP 1279 Oakmead Parkway Sunnyvale, CA 94085-4040 (US)
Priority Data:
12/900,863 08.10.2010 US
Title (EN) METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
(FR) PROCÉDÉ POUR DÉTERMINER UNE PROPRIÉTÉ ASYMÉTRIQUE D'UNE STRUCTURE
Abstract: front page image
(EN)Methods of determining asymmetric properties of structures are described. A method includes measuring, for a grating structure, a first signal and a second, different, signal obtained by optical scatterometry. A difference between the first signal and the second signal is then determined. An asymmetric structural parameter of the grating structure is determined based on a calculation using the first signal, the second signal, and the difference.
(FR)L'invention concerne des procédés permettant de déterminer des propriétés asymétriques de structures. Le procédé consiste à mesurer, pour une structure de réseau, un premier signal et un second signal différent obtenus par diffusométrie optique. Une différence entre le premier signal et le second signal est ensuite déterminée. Un paramètre structurel asymétrique de la structure de réseau est déterminé à partir d'un calcul utilisant le premier signal, le second signal et la différence.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)