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Machine translation
1. (WO2012047034) SUBSTRATE PROCESSING DEVICE EQUIPPED WITH SEMICIRCLE SHAPED ANTENNA
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/047034    International Application No.:    PCT/KR2011/007399
Publication Date: 12.04.2012 International Filing Date: 06.10.2011
IPC:
H05H 1/46 (2006.01), H01L 21/205 (2006.01)
Applicants: EUGENE TECHNOLOGY CO., LTD. [KR/KR]; 209-3 Chugye-ri Yangji-myeon, Cheoin-gu, Yongin-si Gyeonggi-do 449-824 (KR) (For All Designated States Except US).
JE, Sung Tae [KR/KR]; (KR) (For US Only).
YANG, Il Kwang [KR/KR]; (KR) (For US Only).
SONG, Byung Gyu [KR/KR]; (KR) (For US Only).
PARK, Song Hwan [KR/KR]; (KR) (For US Only)
Inventors: JE, Sung Tae; (KR).
YANG, Il Kwang; (KR).
SONG, Byung Gyu; (KR).
PARK, Song Hwan; (KR)
Agent: JEONG, Seong Jin; (2nd Floor, Ace High-End Tower 3, Gasan-Dong) Rm. 204, 145 Gasan Digital 1-ro Gumchun-gu, Seoul 153-787 (KR)
Priority Data:
10-2010-0097150 06.10.2010 KR
Title (EN) SUBSTRATE PROCESSING DEVICE EQUIPPED WITH SEMICIRCLE SHAPED ANTENNA
(FR) DISPOSITIF DE TRAITEMENT DE SUBSTRAT ÉQUIPÉ D'UNE ANTENNE EN FORME DE DEMI-CERCLE
(KO) 반원 형상의 안테나를 구비하는 기판 처리 장치
Abstract: front page image
(EN)A substrate processing device according to one embodiment of the present invention comprises: a chamber wherein substrate processing takes place; a substrate support mounted inside the chamber and whereon the substrate is placed; and an antenna mounted on the upper portion of the chamber and forming an electric field inside the chamber, wherein the antenna is provided with a first antenna and a second antenna placed to form a symmetry on the basis of a preset center line, the first antenna comprises a first inside antenna and a first middle antenna having a first radius and a second radius respectively and placed on one side and the other side of the preset center line respectively, and a first connection antenna for interconnecting the first inside antenna and the first middle antenna, and the second antenna comprises a semicircle-shaped second middle antenna and a second inside antenna having the first radius and the second radius respectively and placed on one side and the other side of the center line respectively, and a second connection antenna for interconnecting the second middle antenna and the second inside antenna.
(FR)Un mode de réalisation de présente invention concerne un dispositif de traitement de substrat comprenant : une chambre dans laquelle a lieu le traitement du substrat ; un support de substrat monté dans la chambre et sur lequel le substrat est placé ; et une antenne montée sur la partie supérieure de la chambre et formant un champ électrique dans la chambre, l'antenne étant pourvue d'une première antenne et d'une seconde antenne placées pour former une symétrie en fonction d'une ligne médiane prédéfinie, la première antenne comprenant une première antenne intérieure et une première antenne centrale présentant un premier rayon et un second rayon, respectivement, et placées sur un côté et l'autre côté de la ligne médiane prédéfinie, respectivement, et une première antenne de connexion destinée à interconnecter la première antenne intérieure et la première antenne centrale, et la seconde antenne comprenant une seconde antenne centrale en forme de demi-cercle et une seconde antenne intérieure présentant le premier rayon et le second rayon, respectivement, et placées sur un côté et l'autre côté de la ligne centrale, respectivement, et une seconde antenne de connexion destinée à interconnecter la seconde antenne centrale et la seconde antenne intérieure.
(KO)본 발명의 일 실시예에 의하면, 기판처리장치는 기판에 대한 공정이 이루어지는 챔버; 상기 챔버의 내부에 설치되며, 상기 기판이 놓여지는 기판지지대; 그리고 상기 챔버의 상부에 설치되어 상기 챔버의 내부에 전계(electric field)를 형성하는 안테나를 포함하되, 상기 안테나는 기설정된 중심선을 기준으로 대칭을 이루도록 배치되는 제1 및 제2 안테나를 구비하고, 상기 제1 안테나는 제1 및 제2 반경을 각각 가지고 기설정된 중심선을 기준으로 일측 및 타측에 각각 위치하는 반원 형상의 제1 내측안테나 및 제1 중간안테나와, 상기 제1 내측안테나 및 상기 제1 중간안테나를 서로 연결하는 제1 연결안테나를 가지며, 상기 제2 안테나는 상기 제1 및 제2 반경을 각각 가지고 상기 중심선을 기준으로 일측 및 타측에 각각 위치하는 반원 형상의 제2 중간안테나 및 제2 내측안테나와, 상기 제2 중간안테나 및 상기 제2 내측안테나를 서로 연결하는 제2 연결안테나를 구비한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)