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1. (WO2012043272) CONVEYANCE DEVICE USED FOR SURFACE TREATMENT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/043272    International Application No.:    PCT/JP2011/071212
Publication Date: 05.04.2012 International Filing Date: 16.09.2011
IPC:
H01L 21/677 (2006.01), B65G 49/06 (2006.01)
Applicants: SEKISUI CHEMICAL CO., LTD. [JP/JP]; 4-4, Nishitemma 2-chome, Kita-ku, Osaka-shi, Osaka 5308565 (JP) (For All Designated States Except US).
SHARP KABUSHIKI KAISHA [JP/JP]; 22-22, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka 5458522 (JP) (For All Designated States Except US).
KUNUGI Shunsuke [JP/JP]; (JP) (For US Only).
MAYUMI Satoshi [JP/JP]; (JP) (For US Only).
YOSHIZAWA Takenori [JP/JP]; (JP) (For US Only).
KOBAYASHI Kazuki [JP/JP]; (JP) (For US Only)
Inventors: KUNUGI Shunsuke; (JP).
MAYUMI Satoshi; (JP).
YOSHIZAWA Takenori; (JP).
KOBAYASHI Kazuki; (JP)
Agent: WATANABE Noboru; 3rd Floor, Gobancho KU Building 10 Gobancho, Chiyoda-ku Tokyo 1020076 (JP)
Priority Data:
2010-217420 28.09.2010 JP
Title (EN) CONVEYANCE DEVICE USED FOR SURFACE TREATMENT
(FR) DISPOSITIF DE TRANSPORT UTILISÉ POUR LE TRAITEMENT DE SURFACE
(JA) 表面処理用搬送装置
Abstract: front page image
(EN)[Problem] To ensure uniformity of the surface treatment and to reliably convey a substrate to be treated in a conveyance device used for surface treatment. [Solution] A plurality of shafts (30) are arranged at an interval in the conveyance direction (x) within the treatment region (R) of a conveyance device (20) used for surface treatment. Rotary support bodies (40) are disposed on each of the shafts (30). The rotary support bodies (40) are disposed in a dispersed manner in the conveyance direction (x) and width direction (y) such that the number (N40) of rotary support bodies (40) arranged in the treatment region (R) on a given line segment (L) along the conveyance direction (x) is constant in almost all the positions in the width direction (y). A substrate (9) to be processed is supported on the rotary support bodies (40) and the rotary support bodies (40) rotate about the axis of the shafts (30).
(FR)L'invention vise à garantir l'uniformité du traitement de surface et à transporter de manière fiable un substrat à traiter dans un dispositif de transport utilisé pour le traitement de surface. Une pluralité d'arbres (30) sont agencés à un intervalle dans la direction de transport (x) dans la zone de traitement (R) d'un dispositif de transport (20) utilisé pour le traitement de surface. Des corps de support rotatifs (40) sont disposés sur chacun des arbres (30). Les corps de support rotatifs (40) sont disposés de manière dispersée dans la direction de transport (x) et dans la direction de la largeur (y) de sorte que le nombre (N40) de corps de support rotatifs (40) agencés dans la zone de traitement (R) sur un segment de ligne (L) donné le long de la direction de transport (x) soit constant dans presque toutes les positions dans la direction de la largeur (y). Un substrat (9) à traiter est supporté sur les corps de support rotatifs (40) et les corps de support rotatifs (40) tournent autour de l'axe des arbres (30).
(JA)<課題>表面処理用の搬送装置において、表面処理の均一性を確保し、かつ被処理基板を確実に搬送する。<課題解決手段>表面処理用搬送装置(20)の処理領域(R)内に複数のシャフト(30)を搬送方向(x)に間隔を置いて並べる。各シャフト(30)に回転支持体(40)を設ける。処理領域(R)内における搬送方向(x)に沿う任意の線分(L)上に存在する回転支持体(40)の数(N40)が巾方向(y)の殆どすべての位置で一定になるよう、回転支持体(40)を搬送方向(x)及び巾方向(y)に分散させて配置する。被処理基板(9)を回転支持体(40)にて支持し、回転支持体(40)をシャフト(30)の軸線の周りに回転させる。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)