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1. (WO2012043220) POLISHING AGENT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2012/043220    International Application No.:    PCT/JP2011/070891
Publication Date: 05.04.2012 International Filing Date: 13.09.2011
H01L 21/304 (2006.01), B24B 37/00 (2012.01), C09K 3/14 (2006.01)
Applicants: Mitsui Mining & Smelting Co., Ltd. [JP/JP]; 1-11-1, Osaki, Shinagawa-ku, Tokyo 1418584 (JP) (For All Designated States Except US).
YANAGI, Kiyotaka [JP/JP]; (JP) (For US Only).
KOIKE, Atsushi [JP/JP]; (JP) (For US Only).
SUZUOKA, Kenji [JP/JP]; (JP) (For US Only).
YASHIMA, Isamu [JP/JP]; (JP) (For US Only)
Inventors: YANAGI, Kiyotaka; (JP).
KOIKE, Atsushi; (JP).
SUZUOKA, Kenji; (JP).
YASHIMA, Isamu; (JP)
Agent: HATORI, Osamu; AKASAKA HKN BLDG., 6F., 8-6, Akasaka 1-chome, Minato-ku, Tokyo 1070052 (JP)
Priority Data:
2010-216396 28.09.2010 JP
(JA) 研磨剤
Abstract: front page image
(EN)This polishing agent is composed of a complex metal oxide which comprises a univalent or bivalent metallic element (that is not a transition metal element) and a transitional metal element, and is used for polishing silicon carbide, corundum aluminium oxide, and gallium nitride. A complex metal oxide containing one, two, or more varieties of transition metallic elements selected from a group including an alkaline metallic element, manganum, cobalt, and nickel is preferred. The complex metal oxide being LiMn2O4, LiCoO2 or LiNiO2 is particularly favorable.
(FR)L'invention concerne un agent de polissage constitué d'un oxyde métallique complexe contenant un élément métallique monovalent ou bivalent (qui n'est pas un élément de métal de transition) et un élément de métal de transition, cet agent de polissage étant utilisé pour polir du carbure de silicium, de l'alumine de corindon et du nitrure de gallium. Un oxyde métallique complexe contenant une, deux ou trois variétés d'éléments métalliques de transition sélectionnés dans un groupe contenant un élément métallique alcalin, le manganèse, le cobalt et le nickel est préférable. L'oxyde métallique complexe LiMn2O4, LiCoO2 ou LiNiO2 est particulièrement approprié.
(JA) 本発明の研磨剤は、一価又は二価の金属元素(ただし遷移金属元素を除く)及び遷移金属元素を含む複合金属酸化物からなり、炭化ケイ素、コランダム型アルミナ又は窒化ガリウムの研磨に用いられる。複合金属酸化物が、アルカリ金属元素並びにマンガン、コバルト及びニッケルからなる群から選択される1種又は2種以上の遷移金属元素を含むものであることが好適である。複合金属酸化物が特に、LiMn24、LiCoO2又はLiNiO2であることが好適である。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)