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1. (WO2011162270) PRESSURE REDUCING APPARATUS

Pub. No.:    WO/2011/162270    International Application No.:    PCT/JP2011/064192
Publication Date: Dec 29, 2011 International Filing Date: Jun 15, 2011
IPC: G05D 16/16
Applicants: SMC KABUSHIKI KAISHA
OKITSU, Masayuki
IGUMA, Naoki
TSUKAMOTO, Kenji
Inventors: OKITSU, Masayuki
IGUMA, Naoki
TSUKAMOTO, Kenji
Title: PRESSURE REDUCING APPARATUS
Abstract:
A pressure reducing apparatus (10) includes a body (12) being equipped with a first side port (20) through which a pressure fluid is supplied and a second side port (22) through which the pressure fluid having been reduced in pressure is discharged. Further, a feedback passage (64) is formed, which establishes communication between the second side port (22) and a third diaphragm chamber (90) that faces toward a pilot valve (93). Additionally, a pressure fluid that flows through the second side port (22) is introduced through the feedback passage (64) into the third diaphragm chamber (90), whereby a third diaphragm (78) is pressed upwardly against an elastic force of a second spring (82) into equilibrium.