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Machine translation
1. (WO2011159625) ADVANCED PROCESS CONTROL OPTIMIZATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/159625    International Application No.:    PCT/US2011/040216
Publication Date: 22.12.2011 International Filing Date: 13.06.2011
IPC:
H01L 21/027 (2006.01)
Applicants: KLA-TENCOR CORPORATION [US/US]; KLA-Tencor Corp. Legal Department 1 Technology Drive Milpitas, California 95035 (US) (For All Designated States Except US).
CHOI, DongSub [KR/KR]; (KR) (For US Only).
WIDMANN, Amir [IL/US]; (US) (For US Only).
KANDEL, Daniel [IL/IL]; (IL) (For US Only).
TIEN, David [US/US]; (US) (For US Only)
Inventors: CHOI, DongSub; (KR).
WIDMANN, Amir; (US).
KANDEL, Daniel; (IL).
TIEN, David; (US)
Agent: MCANDREWS, Kevin; Kla-Tencor Corp. Legal Department 1 Technology Drive Milpitas, California 95035 (US)
Priority Data:
61/354,377 14.06.2010 US
13/156,865 09.06.2011 US
Title (EN) ADVANCED PROCESS CONTROL OPTIMIZATION
(FR) OPTIMISATION DE COMMANDE DE PROCESSUS AVANCÉE
Abstract: front page image
(EN)A method for automatic process control (APC) performance monitoring may include, but is not limited to: computing one or more APC performance indicators for one or more production lots of semiconductor devices; and displaying a mapping of the one or more APC performance indicators to the one or more production lots of semiconductor devices.
(FR)Le procédé selon l'invention de contrôle de performance de commande de processus automatique (APC) peut consister, mais n'est pas limité : à calculer un ou plusieurs indicateur(s) de performance d'APC pour un ou plusieurs lot(s) de production de dispositifs semi-conducteurs ; et à afficher une cartographie du ou des indicateur(s) de performance d'APC pour le ou les lot(s) de production de dispositifs semi-conducteurs.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)