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1. (WO2011158646) LASER GENERATING DEVICE AND LASER GENERATION METHOD

Pub. No.:    WO/2011/158646    International Application No.:    PCT/JP2011/062538
Publication Date: Dec 22, 2011 International Filing Date: May 31, 2011
IPC: G02F 1/37
H01L 21/268
Applicants: V TECHNOLOGY CO., LTD.
株式会社ブイ・テクノロジー
KAJIYAMA, Koichi
梶山 康一
MIZUMURA, Michinobu
水村 通伸
Inventors: KAJIYAMA, Koichi
梶山 康一
MIZUMURA, Michinobu
水村 通伸
Title: LASER GENERATING DEVICE AND LASER GENERATION METHOD
Abstract:
Disclosed are a laser generating device and a laser generation method. A laser beam including a fundamental wave and also including a second harmonic and a third harmonic is divided into laser beams (L1-L3) of each wavelength by means of dichroic mirrors (31, 32). Each of the laser beams (L1-L3) are then divided into P-polarized components (L1P-L3P) and S-polarized components (L1S-L3S) by means of polarizing beam splitters (51(L1)-51(L3)). The S-polarized components (L1S-L3S) reflected by the polarizing beam splitters (51(L1)-51(L3)) are refracted in the direction orthogonal to the P-polarized components (L1P-L3P) by pairs of total reflection mirrors (42(L1)-42(L3), 43(L1)-43(L3)). The P-polarized components (L1P-L3P) and the S-polarized components (L1S-L3S) are then combined on the same optic axis, for each wavelength, by the polarizing beam splitters (52(L1)-52(L3)). In addition, the laser beams (L1-L3) of each wavelength obtained by combining the polarized components are combined on the same optic axis by the dichroic mirrors (33, 34) and are then output. As a result, laser beams can be utilized without waste and laser beams of a desired waveform can be readily obtained, and in addition laser beams of a plurality of wavelengths can be respectively emitted having an elongated pulse width.