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1. (WO2011156864) NANOPOROUS VACUUM PUMP

Pub. No.:    WO/2011/156864    International Application No.:    PCT/AU2011/000729
Publication Date: Dec 22, 2011 International Filing Date: Jun 17, 2011
IPC: B01D 69/00
H01J 49/04
Applicants: GBC SCIENTIFIC EQUIPMENT PTY. LTD.
SAINT, Andrew
Inventors: SAINT, Andrew
Title: NANOPOROUS VACUUM PUMP
Abstract:
The invention provides an element (12), comprising: a nanoporous insulating film (20) (such as a thin nanoporous diamond film) and first and second conducting layers (18a, 18b) on first and second opposed sides respectively of the film (20). Also provided are a vacuum pump (10), an ion source (80) and an ion trap (98), each comprising such an element (12).