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Machine translation
1. (WO2011155651) APPARATUS FOR MANUFACTURING AN ORGANIC SEMICONDUCTOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/155651    International Application No.:    PCT/KR2010/003809
Publication Date: 15.12.2011 International Filing Date: 14.06.2010
IPC:
H01L 51/56 (2006.01), C23C 14/24 (2006.01)
Applicants: SNU PRECISION CO., LTD. [KR/KR]; 1629-2, Bongcheon 7-dong Gwanak-gu Seoul 151-057 (KR) (For All Designated States Except US).
KANG, Chang-Ho [KR/KR]; (KR) (For US Only).
KWON, Hyun-Goo [KR/KR]; (KR) (For US Only).
CHOI, Ho-Joong [KR/KR]; (KR) (For US Only).
KIM, Jung-Jin [KR/KR]; (KR) (For US Only)
Inventors: KANG, Chang-Ho; (KR).
KWON, Hyun-Goo; (KR).
CHOI, Ho-Joong; (KR).
KIM, Jung-Jin; (KR)
Agent: KIM, Taewan; #709 Korea Business Center 1338-21, Seocho-dong, Seocho-gu Seoul 137-070 (KR)
Priority Data:
10-2010-0055019 10.06.2010 KR
Title (EN) APPARATUS FOR MANUFACTURING AN ORGANIC SEMICONDUCTOR
(FR) APPAREIL POUR FABRIQUER UN SEMI-CONDUCTEUR ORGANIQUE
(KO) 유기 반도체 제조장치
Abstract: front page image
(EN)Disclosed is an apparatus for manufacturing an organic semiconductor in which the space between the transparent substrate and the spray device is minimized and the deposition material is not deposited on an adjacent sensor. To this end, the apparatus for manufacturing an organic semiconductor comprises: an exposed section formed in at least one portion of a transport member and outwardly leaking at least some of a deposition material transported by the transport member; and a sensing unit disposed close to the exposed section and sensing the amount of deposition material leaked through the exposed section. Thus, the deposition material sprayed from an adjacent spray member cannot be deposited on the sensing unit. In addition, the amount of deposition material sprayed from the transport members can be measured accurately. Accordingly, measurement reliability can be enhanced for measuring the thickness of the deposition material deposited on the transparent substrate.
(FR)L'invention concerne un appareil pour fabriquer un semi-conducteur organique dans lequel l'espace entre un substrat transparent et un dispositif de pulvérisation est minimisé, et le matériau de revêtement n'est pas déposé sur un capteur adjacent. À cette fin, ledit appareil comprend une section exposée formée au moins dans une partie d'un dispositif de transport et laissant échapper vers l'extérieur au moins une partie d'un matériau de revêtement transporté par le dispositif de transport ; et une unité de détection disposée à côté de la section exposée et détectant la quantité de matériau de revêtement échappé par la section exposée. Ainsi, le matériau de revêtement pulvérisé par un dispositif de pulvérisation adjacent ne peut pas être déposé sur l'unité de détection. De plus, la quantité de matériau de revêtement pulvérisé à partir du dispositif de transport peut être mesurée avec précision. Par conséquent, la fiabilité des mesures d'épaisseur du matériau de revêtement déposé sur le substrat transparent peut être améliorée.
(KO)투명기판과 분사장치 사이의 간격을 최소화하고, 인접한 센서로 증착물이 증착되지 않게 한 유기 반도체 제조장치가 개시된다. 이를 위한, 유기 반도체 제조장치는 이송부재를 따라 이송되는 증착물질 중 적어도 일부가 외부로 유출되도록 이송부재의 적어도 일부에 형성된 노출부와, 노출부에 인접하게 배치되어 노출부를 통하여 유출되는 증착물질의 유출량을 감지하는 감지유닛을 포함한다. 이에 따라, 인접한 분사부재로부터 분사되는 증착물질이 감지유닛에 증착되지 않을 뿐만 아니라, 각각의 이송부재로부터 분사되는 증착물질의 분사량을 정확하게 측정할 수 있다. 그러므로, 투명기판 상에 증착된 증착물질의 두께를 측정하는데 있어서, 측정 신뢰성을 향상시킬 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)