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Machine translation
1. (WO2011148281) CLOSED CHAMBER WITH FLUID SEPARATION FEATURE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/148281    International Application No.:    PCT/IB2011/051923
Publication Date: 01.12.2011 International Filing Date: 02.05.2011
IPC:
H01L 21/02 (2006.01), H01L 21/683 (2006.01)
Applicants: LAM RESEARCH AG [AT/AT]; SEZ-Strasse 1 A-9500 Villach (AT) (For All Designated States Except US).
LAM RESEARCH CORPORATION [US/US]; 4650 Cushing Parkway Fremont, CA 94538 (US) (BZ only).
GLEISSNER, Andreas [AT/AT]; (AT) (For US Only).
OBWEGER, Rainer [AT/AT]; (AT) (For US Only)
Inventors: GLEISSNER, Andreas; (AT).
OBWEGER, Rainer; (AT)
Agent: KONTRUS, Gerhard; SEZ-Strasse 1 A-9500 Villach (AT)
Priority Data:
12/787,196 25.05.2010 US
Title (EN) CLOSED CHAMBER WITH FLUID SEPARATION FEATURE
(FR) CHAMBRE FERMÉE À ÉLÉMENT DE SÉPARATION DE FLUIDE
Abstract: front page image
(EN)Selective recovery of excess process fluid from within a closed process chamber is achieved by providing a magnetically drive ring chuck and at least one process fluid collector within the closed process chamber, with the ring chuck and the fluid collector being vertically movable relative to each other.
(FR)La récupération sélective d'un excès de fluide de traitement depuis l'intérieur d'une chambre de traitement fermée est réalisée par la mise en place d'un mandrin annulaire à entraînement magnétique et d'au moins un collecteur de fluide de traitement dans la chambre de traitement fermée, le mandrin annulaire et le collecteur de fluide étant verticalement mobiles l'un par rapport à l'autre.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)