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1. (WO2011147322) COMPOSITE GETTER FOR MAINTAINING MEDIUM AND LOW VACUUM ENVIRONMENT, AND METHOD FOR PRODUCING SAME

Pub. No.:    WO/2011/147322    International Application No.:    PCT/CN2011/074729
Publication Date: Dec 1, 2011 International Filing Date: May 26, 2011
IPC: B01J 20/02
H01J 9/39
H01L 23/26
Applicants: FUJIAN SUPER TECH ADVANCED MATERIAL.CO., LTD.
福建赛特新材股份有限公司
DI, Xiaobo
邸小波
XIE, Zhengang
谢振刚
HONG, Guoying
洪国莹
Inventors: DI, Xiaobo
邸小波
XIE, Zhengang
谢振刚
HONG, Guoying
洪国莹
Title: COMPOSITE GETTER FOR MAINTAINING MEDIUM AND LOW VACUUM ENVIRONMENT, AND METHOD FOR PRODUCING SAME
Abstract:
A composite getter for maintaining medium and low vacuum environment comprises an elemental metal powder getter (3), an alloy powder getter (2), a drying agent powder (1) and a plastic film (4), wherein the elemental metal powder getter (3) and the alloy powder getter (2) are present respectively as one layer and stacked in the center position of the drying agent powder (1) to form a core-clad structure, which is packed in the plastic film (4). The elemental metal powder getter (3) is one or a combination of at least two selected from the group consisting of reduced iron powder, nickel powder and copper powder with a grain size range from 10 to 200 μm. The alloy powder getter (2) is one or a combination of at least two selected from the group consisting of strontium-lithium alloy powder, barium-lithium alloy powder and barium-magnesium alloy powder with a grain size range from 50 to 500 μm. The drying agent powder (1) is one or a combination of at least two selected from the group consisting of calcium oxide powder, strontium oxide powder and barium oxide powder with a grain size range from 20 to 200 μm. The plastic film (4) is breakable automatically under a pressure difference of one atmosphere. The performance properties of this composite getter is not affected when exposed to air for a short period of time. The method for producing the composite getter is also disclosed.