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1. (WO2011146846) MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/146846    International Application No.:    PCT/US2011/037356
Publication Date: 24.11.2011 International Filing Date: 20.05.2011
IPC:
H04R 17/00 (2006.01), H02N 1/00 (2006.01)
Applicants: SAND9, INC. [US/US]; One Kendall Square Suite B2305 Cambridge, MA 02139-1594 (US) (For All Designated States Except US).
KUYPERS, Jan, H. [GB/US]; (US) (For US Only).
SPARKS, Andrew [US/US]; (US) (For US Only).
SCHOEPF, Klaus, Juergen [DE/US]; (US) (For US Only).
REBEL, Reimund [DE/US]; (US) (For US Only)
Inventors: KUYPERS, Jan, H.; (US).
SPARKS, Andrew; (US).
SCHOEPF, Klaus, Juergen; (US).
REBEL, Reimund; (US)
Agent: FRANKLIN, Thomas, A.; Wolf, Greenfield & Sacks, P.C. 600 Atlantic Avenue Boston, MA 02210-2206 (US)
Priority Data:
61/347,169 21.05.2010 US
Title (EN) MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
(FR) MEMBRANES MICROMÉCANIQUES, STRUCTURES ET PROCÉDÉS ASSOCIÉS
Abstract: front page image
(EN)Micromechanical membranes suitable for formation of mechanical resonating structures are described, as well as methods for making such membranes. The membranes may be formed by forming cavities in a substrate, and in some instances may be oxidized to provide desired mechanical properties. Mechanical resonating structures may be formed from the membrane and oxide structures.
(FR)L'invention porte sur des membranes micromécaniques qui sont appropriées pour la formation de structures résonnantes mécaniques, ainsi que sur des procédés pour la fabrication de telles membranes. Les membranes peuvent être formées par la formation de cavités dans un substrat et, dans certains cas, peuvent être oxydées afin de fournir les propriétés mécaniques voulues. L'invention porte également sur des structures résonantes mécaniques, qui peuvent être formées de la membrane et de structures à oxyde.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)