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Machine translation
1. (WO2011142986) FIXED ABRASIVE PAD WITH SURFACTANT FOR CHEMICAL MECHANICAL PLANARIZATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/142986    International Application No.:    PCT/US2011/034439
Publication Date: 17.11.2011 International Filing Date: 29.04.2011
IPC:
B24D 3/34 (2006.01)
Applicants: 3M INNOVATIVE PROPERTIES COMPANY [US/US]; 3M Center Post Office Box 33427 Saint Paul, Minnesota 55133-3427 (US) (For All Designated States Except US).
QIAN, Julie Y. [US/US]; (US) (For US Only).
BARAN, Jimmie R., Jr. [US/US]; (US) (For US Only)
Inventors: QIAN, Julie Y.; (US).
BARAN, Jimmie R., Jr.; (US)
Agent: WOLF, Stephen F.; 3M Center Office of Intellectual Property Counsel Post Office Box 33427 Saint Paul, Minnesota 55133-3427 (US)
Priority Data:
61/333,351 11.05.2010 US
Title (EN) FIXED ABRASIVE PAD WITH SURFACTANT FOR CHEMICAL MECHANICAL PLANARIZATION
(FR) TAMPON ABRASIF FIXE AVEC AGENT DE SURFACE À DES FINS DE PLANARISATION PAR POLISSAGE CHIMICO-MÉCANIQUE
Abstract: front page image
(EN)A fixed abrasive pad (100) in the form of a structured abrasive article is provided that has a structured abrasive layer (120) disposed on a backing (110). The structured abrasive layer (120) includes a polymeric binder, abrasive particles dipersed in the binder and a nonionic polyether surfactant dispersed in the binder. The abrasive particles have a mean particle size of less than 200 nm and the surfactant is in the binder in an amount of from 0.75 to 2.2 weight percent based upon the total weight of the structured abrasive layer. A method of abrading a workpiece using the provided fixed abrasive pad is also provided.
(FR)L'invention concerne un tampon abrasif fixe (100) présenté sous la forme d'un article abrasif structuré qui comporte une couche abrasive structurée (120) disposée sur un support (110). La couche abrasive structurée (120) comprend un liant polymère, des particules abrasives dispersées dans le liant et un agent de surface de polyéther non ionique dispersé dans le liant. Les particules abrasives ont une grosseur moyenne de particule de moins d'environ 250 nm et l'agent de surface est dans le liant en une quantité allant de 0,75 à 2,2 en pourcentage en poids en se basant sur le poids total de la couche abrasive structurée. L'invention concerne aussi un procédé permettant d'abraser une pièce en utilisant le tampon abrasif fixe fourni.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)