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Pub. No.:    WO/2011/137069    International Application No.:    PCT/US2011/033777
Publication Date: 03.11.2011 International Filing Date: 25.04.2011
H01L 21/02 (2006.01), H01L 21/205 (2006.01), H01L 21/3065 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US) (For All Designated States Except US).
XU, Ming [CA/US]; (US) (For US Only).
NGUYEN, Andrew [US/US]; (US) (For US Only).
LEE, Evans [US/US]; (US) (For US Only).
LEE, Jared, Ahmad [US/US]; (US) (For US Only).
CRUSE, James, P. [US/US]; (US) (For US Only).
COBB, Corie, Lynn [US/US]; (US) (For US Only).
SALINAS, Martin, Jeff [US/US]; (US) (For US Only).
SHEYNER, Anchel [US/US]; (US) (For US Only).
GOLD, Ezra, Robert [US/US]; (US) (For US Only).
LANE, John, W. [US/US]; (US) (For US Only)
Inventors: XU, Ming; (US).
NGUYEN, Andrew; (US).
LEE, Evans; (US).
LEE, Jared, Ahmad; (US).
CRUSE, James, P.; (US).
COBB, Corie, Lynn; (US).
SALINAS, Martin, Jeff; (US).
SHEYNER, Anchel; (US).
GOLD, Ezra, Robert; (US).
LANE, John, W.; (US)
Agent: TABOADA, Alan; Moser IP Law Group 1030 Broad Street Suite 203 Shrewsbury, NJ 07702 (US)
Priority Data:
61/330,156 30.04.2010 US
12/908,644 20.10.2010 US
Abstract: front page image
(EN)Methods and apparatus for twin chamber processing systems are disclosed, and, in some embodiments, may include a first process chamber and a second process chamber having independent processing volumes and a plurality of shared resources between the first and second process chambers. In some embodiments, the shared resources include at least one of a shared vacuum pump, a shared gas panel, or a shared heat transfer source.
(FR)L'invention concerne des procédés et un dispositif destinés à des systèmes de traitement à deux chambres, et, dans certaines formes de réalisation, pouvant comprendre une première chambre de traitement et une seconde chambre de traitement pourvues de volumes de traitement indépendants, et une pluralité de ressources partagées entre les première et seconde chambres de traitement. Dans certaines formes de réalisation, les ressources partagées comprennent au moins une pompe à vide partagée, un panneau de gaz partagé ou une source partagée de transfert de chaleur.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)