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1. WO2011131981 - CHARACTERISTIC DETERMINATION

Publication Number WO/2011/131981
Publication Date 27.10.2011
International Application No. PCT/GB2011/050777
International Filing Date 19.04.2011
IPC
H01J 37/22 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
G06T 11/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
112D image generation
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 11/303
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
303using photoelectric detection means
H01J 2237/226
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
22Treatment of data
226Image reconstruction
H01J 2237/2614
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
2614Holography or phase contrast, phase related imaging in general, e.g. phase plates
H01J 37/222
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
222Image processing arrangements associated with the tube
Applicants
  • PHASE FOCUS LIMITED [GB]/[GB] (AllExceptUS)
  • HUMPHRY, Martin [GB]/[GB] (UsOnly)
  • MAIDEN, Andrew [GB]/[GB] (UsOnly)
Inventors
  • HUMPHRY, Martin
  • MAIDEN, Andrew
Agents
  • BENSON, Christopher
Priority Data
1006593.620.04.2010GB
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) CHARACTERISTIC DETERMINATION
(FR) DÉTERMINATION DE CARACTÉRISTIQUES
Abstract
(EN) Embodiments of the present invention provide a method of determining at least one characteristic of a target surface, comprising providing a phase map for a first region of a target surface via radiation having a first wavelength,providing n further phase maps for the first region via radiation having a further n wavelengths each different from the first wavelength,and determining at least one characteristic at the target surface responsive to the first and further phase maps.
(FR) Conformément à des modes de réalisation, la présente invention porte sur un procédé de détermination d'au moins une caractéristique d'une surface cible, lequel procédé comprend la fourniture d'une carte de phase pour une première région d'une surface cible par l'intermédiaire d'un rayonnement ayant une première longueur d'ondes, la fourniture de n cartes supplémentaires de phase pour la première région par l'intermédiaire d'un rayonnement ayant n longueurs d'ondes supplémentaires chacune différente de la première longueur d'ondes, et la détermination d'au moins une caractéristique au niveau de la surface cible en réponse à la première carte de phase et aux cartes de phase supplémentaires.
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