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1. WO2011128828 - HOT-WIRE SENSOR OF SUBMILLIMETER SIZE AND ASSOCIATED METHOD OF PRODUCTION

Publication Number WO/2011/128828
Publication Date 20.10.2011
International Application No. PCT/IB2011/051546
International Filing Date 11.04.2011
IPC
G01P 5/12 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
5Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
10by measuring thermal variables
12using variation of resistance of a heated conductor
G01F 1/684 2006.1
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
CPC
G01F 1/6845
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
6845Micromachined devices
G01F 1/69
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
688using a particular type of heating, cooling or sensing element
69of resistive type
G01F 1/692
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
688using a particular type of heating, cooling or sensing element
69of resistive type
692Thin-film arrangements
G01P 5/12
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
5Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
10by measuring thermal variables
12using variation of resistance of a heated conductor
Y10T 29/49156
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49002Electrical device making
49117Conductor or circuit manufacturing
49124On flat or curved insulated base, e.g., printed circuit, etc.
49155Manufacturing circuit on or in base
49156with selective destruction of conductive paths
Applicants
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE [FR]/[FR] (AllExceptUS)
  • ECOLE CENTRALE DE LILLE [FR]/[FR] (AllExceptUS)
  • PERNOD, Philippe Jacques [FR]/[FR] (UsOnly)
  • GIMENO MONGE, Leticia [FR]/[FR] (UsOnly)
  • TALBI, Abdelkrim [FR]/[FR] (UsOnly)
  • MERLEN, Alain [FR]/[FR] (UsOnly)
  • VIARD, Romain Victor Jean [FR]/[FR] (UsOnly)
  • MORTET, Vincent [FR]/[BE] (UsOnly)
  • SOLTANI, Ali [FR]/[FR] (UsOnly)
  • PREOBRAZHENSKY, Vladimir [RU]/[FR] (UsOnly)
Inventors
  • PERNOD, Philippe Jacques
  • GIMENO MONGE, Leticia
  • TALBI, Abdelkrim
  • MERLEN, Alain
  • VIARD, Romain Victor Jean
  • MORTET, Vincent
  • SOLTANI, Ali
  • PREOBRAZHENSKY, Vladimir
Agents
  • PRIORI Enrico
Priority Data
100152312.04.2010FR
Publication Language French (fr)
Filing Language French (FR)
Designated States
Title
(EN) HOT-WIRE SENSOR OF SUBMILLIMETER SIZE AND ASSOCIATED METHOD OF PRODUCTION
(FR) CAPTEUR A FIL CHAUD DE TAILLE SUBMILLIMETRIQUE ET PROCEDE DE REALISATION ASSOCIE
Abstract
(EN) The invention relates to a submillimetre-sized hot-wire sensor (1) comprising a substrate (10), two support rods (11, 12), a metal wire (13) extending between the two ends of the support rods (11, 12), and electrical contacts (14, 15) disposed on the support rods, said contacts each being linked to one of the ends of the wire (13). The metal wire comprises at least two layers of metal materials, one of said layers being made of a material exhibiting a residual stress under tension and the other layer being made of a material exhibiting a residual stress under compression. The thicknesses of these metal layers are adapted so as to compensate the residual stresses between the various layers.
(FR) L'invention concerne un capteur (1 ) à fil chaud de taille submillimétrique qui comprend un substrat (10), deux tiges support (11, 12), un fil métallique (13) s 1 étendant entre les deux extrémités des tiges support (11, 12) et des contacts électriques (14, 15) disposés sur les tiges supports, lesdits contacts étant chacun reliés à l'une des extrémités du fil (13). Le fil métallique comprend au moins deux couches de matériaux métalliques, dont l'une est réalisée en un matériau présentant une contrainte résiduelle en tension et dont l'autre est réalisée en un matériau présentant une contrainte résiduelle en compression. Les épaisseurs de ces couches de métal étant adaptées pour compenser les contraintes résiduelles entre les différents couches.
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