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1. (WO2011126133) SUBSTRATE CARTRIDGE, SUBSTRATE STORAGE DEVICE, AND SUBSTRATE PROCESSING SYSTEM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2011/126133 International Application No.: PCT/JP2011/059006
Publication Date: 13.10.2011 International Filing Date: 11.04.2011
IPC:
B65H 75/36 (2006.01) ,B65H 20/34 (2006.01) ,H01L 51/50 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
H
HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
75
Storing webs, tapes, or filamentary material, e.g. on reels
02
Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans
34
specially adapted or mounted for storing and repeatedly paying-out and re-storing lengths of material provided for particular purposes, e.g. anchored hoses, power cables
36
without essentially involving the use of a core or former internal to a stored package of material, e.g. with stored material housed within casing or container, or intermittently engaging a plurality of supports as in sinuous or serpentine fashion
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
H
HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
20
Advancing webs
30
Arrangements for accumulating surplus web
32
by making loops
34
with rollers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
Applicants:
株式会社ニコン NIKON CORPORATION [JP/JP]; 東京都千代田区有楽町一丁目12番1号 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 1008331, JP (AllExceptUS)
浜田 智秀 HAMADA Tomohide [JP/JP]; JP (UsOnly)
木内 徹 KIUCHI Tohru [JP/JP]; JP (UsOnly)
Inventors:
浜田 智秀 HAMADA Tomohide; JP
木内 徹 KIUCHI Tohru; JP
Agent:
志賀 正武 SHIGA Masatake; 東京都千代田区丸の内一丁目9番2号 1-9-2, Marunouchi, Chiyoda-ku, Tokyo 1006620, JP
Priority Data:
61/322,36009.04.2010US
61/423,20715.12.2010US
Title (EN) SUBSTRATE CARTRIDGE, SUBSTRATE STORAGE DEVICE, AND SUBSTRATE PROCESSING SYSTEM
(FR) CARTOUCHE DE SUPPORT, DISPOSITIF DE STOCKAGE DE SUPPORT ET SYSTÈME DE TRAITEMENT DE SUPPORT
(JA) 基板カートリッジ、基板保管装置及び基板処理システム
Abstract:
(EN) The disclosed substrate cartridge (CTR) is provided with a storage unit (1), a carry-out port (3), a carry-in port (2), and a guide unit (4). The storage unit (1) stores a band-shaped substrate (FB). The carry-out port (3) and the carry-in port (2) are provided to the storage unit (1), and allow the substrate (FB) through. The guide unit (4) guides the substrate (FB) from the carry-in port (2) to the carry-out port (3). The guide unit (4) contains a mobile guide plate (45) and moving rollers (47, 48). The moving rollers (47, 48) include a telescoping section (52b). First, the mobile guide plate (45) is held horizontally and causes the telescoping section (52b) to contract. The leading edge of the substrate (FB) is supported on the guide plate (25). When the substrate (FB) is sent in using a carry-in roller (23), the guide plate (45) is pivoted to a vertical position. As the substrate (FB) is carried in, the telescoping section (52b) gradually extends. The cartridge (CTR) is connected to a substrate processing device (FPA).
(FR) La présente invention concerne une cartouche de support (CTR) pourvue d'une unité de stockage (1), d'un orifice de transport vers l'extérieur (3), d'un orifice de transport vers l'intérieur (2) et d'une unité de guidage (4). L'unité de stockage (1) stocke un support en forme de bande (FB). L'orifice de transport vers l'extérieur (3) et l'orifice de transport vers l'intérieur (2) sont disposés sur l'unité de stockage (1) et laissent passer le support (FB) à travers. L'unité de guidage (4) guide le support (FB) de l'orifice de transport vers l'intérieur (2) jusqu'à l'orifice de transport vers l'extérieur (3). L'unité de guidage (4) contient une plaque de guidage mobile (45) et des rouleaux mobiles (47, 48). Les rouleaux mobiles (47, 48) comprennent une section télescopique (52b). Premièrement, la plaque de guidage mobile (45) est maintenue à l'horizontale et entraîne la contraction de la section télescopique (52b). Le bord avant du support (FB) est supporté sur la plaque de guidage (25). Lorsque le support (FB) est envoyé au moyen d'un rouleau de transport vers l'intérieur (23), la plaque de guidage (45) pivote dans une position verticale. À mesure que le support (FB) est transporté vers l'intérieur, la section télescopique (52b) s'étend progressivement. La cartouche (CTR) est raccordée à un dispositif de traitement de support (FPA).
(JA) 基板カートリッジ( C T R ) は、収容部( 1 ) 、搬出口( 3 ) 、搬入口( 2 ) 及び案内部( 4 ) を備える。収容部( 1 ) は、帯状の基板( F B ) を収容する。搬出口( 3 )及び搬入口( 2 ) は、収容部( 1 ) に設けられ、基板( F B ) を通じる。案内部( 4 ) は、搬入口( 2 ) から搬出口( 3 ) まで基板( F B ) を案内する。案内部( 4 ) は可動案内板( 4 5 ) 及び移動ローラー( 4 7 、4 8 ) を含む。移動ローラー( 4 7 、4 8 ) は伸縮部( 5 2 b ) を含む。まず、可動案内板( 4 5 ) が水平に保持され、かつ、伸縮部( 5 2 b ) が収縮される。基板( F B ) の先端部は案内板( 4 5 ) 上に支持される。基板( F B ) が搬入ローラー( 2 3 ) で送り込まれるとき、案内板( 4 5 ) は垂直な姿勢へと回動される。基板( F B ) の搬入につれて、伸縮部( 5 2 b ) が徐々に延伸される。カートリッジ( C T R ) は、基板処理装置( F P A ) に接続される。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN102834340JPWO2011126133KR1020130037674KR1020170118243KR1020180034708